Hkmg
Hkmg news and technical articles from Solid State Technology Magazine. Search Hkmg latest and archived news and articles
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ASM covers FinFET precursor needs from epitaxy to HKMG ALD
… marketing, thermal products, discussed the challenges of making FinFET structures using both epitaxial and high- k /metal gate ( HKMG ) atomic layer deposition (ALD) processes, speaking with Solid State Technology during SEMICON West 2011 . "With epi, the …
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Strained silicon and HKMG take the stage at 22nm
… mandate a transition to replacement gate high- k /metal gate ( HKMG ) technology. However, gate-first high- k 22nm devices are ..... the past, advanced technologies such as strained silicon and HKMG transistors have been limited to high-performance desktop and …
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IEDM 2011: Improve HKMG reliability with better SILC
SEMATECH researchers will reveal a reliability study for high- k /metal gate ( HKMG ) nMOSFETs with several mitigating process changes, examining several key factors impacting stress-induced leakage current …
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IEDM interview: SEMATECH’s SILC ~10% and HKMG lifetime; ALD BeO a viable gate stack IPL solution
SEMATECH’s director of front end processes, Paul Kirsch, discusses two of the consortium’s papers presented at IEEE's International Electron Devices Meeting (IEDM) with Solid State Technology in a podcast interview
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GLOBALFOUNDRIES signals 32nm yield success with 250k wafers from Fab 1
… wafers based on 32nm high-k metal gate ( HKMG ) technology. AMD commented that it will ..... Based on this successful ramp of 32nm HKMG , we are committed to moving ahead on 28nm ..... relationship . Early yield learning on 32nm HKMG was significantly challenging early in …
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Scatterometry measurement for gate ADI and AEI CD of 28nm metal gates
… dimensions of the high- k metal gate ( HKMG ) structure are critical for device performance ..... AEI model and parametric description for HKMG . We decided to evaluate a new-generation ..... tool's sensitivity and precision for the HKMG AEI profile, seven DOE wafers with varying …
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IEDM 2011 Preview: Chipworks' must-see picks for IEDM
… integrated with what looks like a 32nm HKMG /e-DRAM process ( 7.1 ), and Renesas ..... enhance scalability of the 28LP gate-first HKMG process. There are two invited papers ..... on simulation of memory fevices S17 ), HKMG reliability ( S18 ), and GaN devices …
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Samsung, IBM and GlobalFoundries look to the future: A report from the Common Platform Technology Forum
… occupied by MPU and GPU functions. Gate last HkMG at 20nm has been selected to meet these needs for 3rd generation HkMG FinFET mobile devices. At 14nm FinFET, you ..... via 0 and minimum pitch M1; both are HkMG gate last. Their 20nm devices are currently …
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Tight 28nm supply shifts GPU maker shares in Q1
… performance (HP) process, the foundry’s most advanced 28nm process which uses their first-generation high- k metal gate ( HKMG ) technology and second-generation silicon germanium (SiGe) straining, Nvidia shares . NVDA’s management reported that …
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SEMATECH highlights from VLSI-TSA
… power, and cost. Research covers high- k /metal gate ( HKMG ) materials, resistive RAM (RRAM) memory, and planar and non ..... induced leakage current (SILC) in full gate-last (FGL) HKMG devices to address sources of SILC and propose possible process …
