Hkmg
Hkmg news and technical articles from Solid State Technology Magazine. Search Hkmg latest and archived news and articles
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ST pairs with Samsung for 32/28nm HKMG
… Electronics' foundry services for 32nm/28nm high- k /metal gate ( HKMG ) process technology, and have taped out a dozen system-on ..... our commitment to advanced process technology and our 32/28nm HKMG process-technology leadership," stated Kwang-Hyun Kim …
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CEA-Leti installs Soitec CVD tool for HKMG and PCM research
… phase-change memory (PCM) devices and high- k metal gates ( HKMG ) for the sub-20nm technology node. The AltaCVD tool will ..... conformal thin films with thicknesses of 100nm or less, which suits HKMG deposition as well. Capable of accommodating 200mm or 300mm …
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IEDM 2009: HKMG gate-first vs gate-last options
… possible options of high- k metal-gate ( HKMG ) transistor stack materials and processes ..... advantages and disadvantages, the role of HKMG in advanced 3D transistor structures, such ..... The secret in successfully implementing HKMG , Hoffman said, is in finding a way to …
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IEDM preview: IBM Alliance simplifies pFET HKMG
… resistive RAM TSMC anneal for gate-last HKMG process Imec IEDM presentations to cover ..... densities IBM Alliance simplifies pFET HKMG IM Flash details 25nm NAND October 18 ..... region prior to high- k /metal gate ( HKMG ) stack depositions. The process allows …
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IEDM preview: IBM Alliance simplifies pFET HKMG process
… shallow silicon channel region prior to high- k /metal gate ( HKMG ) stack depositions. The process allows superior low threshold ..... recrystallization anneal, interfacial layer formation, then HKMG deposition. undesirable hump in the C-V curve could be eliminated …
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ASM covers FinFET precursor needs from epitaxy to HKMG ALD
… marketing, thermal products, discussed the challenges of making FinFET structures using both epitaxial and high- k /metal gate ( HKMG ) atomic layer deposition (ALD) processes, speaking with Solid State Technology during SEMICON West 2011 . "With epi, the …
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Applied's HKMG is ready when you are
… gates, with researchers from AMD, Freescale, IBM, Toshiba, Xilinx, and SEMATECH presenting their experiences integrating HKMG materials into CMOS transistors, and showing that these newer materials are ready for low-standby power IC applications …
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Analysts' take: Samsung incites "foundry wars" with 32nm HKMG volley
… Samsung 32nm process is a gate-first HKMG structure based on the IBM common platform ..... customers already use. Everything at 32nm HKMG can be migrated to 28nm, Hunter said ..... recharacterization and timing. Gate-first HKMG is easier to implement as a transition …
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Samsung tips 32-28nm HKMG plans
… SST. The 32nm process is a gate-first HKMG structure based on the IBM-led Common ..... customers already use. Everything at 32nm HKMG can be migrated to 28nm, Hunter said ..... recharacterization and timing. Gate-first HKMG is easier to implement as a transition …
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Strained silicon and HKMG take the stage at 22nm
… mandate a transition to replacement gate high- k /metal gate ( HKMG ) technology. However, gate-first high- k 22nm devices are ..... the past, advanced technologies such as strained silicon and HKMG transistors have been limited to high-performance desktop and …
