High-K
High-K news and technical articles from Solid State Technology Magazine. Search High-K latest and archived news and articles
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ASM demonstrates ALD, hafnium high-k metal gate at 14nm
… Amsterdam:ASM) created a new 14nm high - k gate dielectric process that achieved ..... additional clustered process steps. The new high - k process enables faster switching and ..... extending the viability of hafnium-based high - k dielectrics. Planar and 3D devices …
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Strained silicon and HKMG take the stage at 22nm
… replacement gate technology. Scaled high - k based gate dielectrics are considered ..... mandate a transition to replacement gate high - k /metal gate (HKMG) technology. However, gate-first high - k 22nm devices are still being developed …
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Tight 28nm supply shifts GPU maker shares in Q1
… 28nm high performance (HP) process, the foundry’s most advanced 28nm process which uses their first-generation high - k metal gate (HKMG) technology and second-generation silicon germanium (SiGe) straining, Nvidia shares . NVDA …
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SEMATECH highlights from VLSI-TSA
… power, and cost. Research covers high - k /metal gate (HKMG) materials, resistive ..... performance also improved with H 2 O-based high - k , suggesting that H 2 O-based ALD ..... Channel Devices: Exploring alternative high - k gate dielectrics for III-V, Ge and …
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Intel (INTC) plans high capex and fast node shrinks, expects chipmaker consolidation
… Intel has sustainable advantages in manufacturing, its product roadmaps, process leadership, technology leadership ( high - k , 3D transistors ), and scale, FBR said. Average capital costs per silicon square inch keep increasing, said Smith, but …
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Scatterometry measurement for gate ADI and AEI CD of 28nm metal gates
… monitoring of the dimensions of the high - k metal gate (HKMG) structure are critical ..... dimensional measurement and control of a 28nm high - k metal gate for two layers: after ..... nanometer-sized variations in the high - k and metal gate recess relative to poly …
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Intel’s Q1 2012 earnings: Key takeaways
… Intel has sustainable advantages in manufacturing, its product roadmaps, process leadership, technology leadership ( high - k , 3D transistors), and scale. However, tablets and smartphones are tempering growth in Intel's core business, with …
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Semiconductor wafer fab equipment trends: Deposition
… Gains were seen in the “other” portion, namely atomic layer deposition (ALD). ALD is used for the high - k gate dielectric in high - k /metal gate (HKMG) devices. Other as a whole picked up 4% share. For more about the top players in …
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Evolution or revolution: the path for metrology beyond the 22nm node
… over fin after chemical mechanical polishing (CMP), high - k /metal gate thickness and taper on the fin and recess after ..... Lin, E., Wu, W.L., Bunday, B. "Nonplanar high - k dielectric thickness measurements using CD-SAXS." Proc …
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GLOBALFOUNDRIES signals 32nm yield success with 250k wafers from Fab 1
… BUSINESS WIRE -- GLOBALFOUNDRIES' Fab 1 in Dresden, Germany has shipped 250,000 semiconductor wafers based on 32nm high - k metal gate (HKMG) technology. AMD commented that it will move ahead with 28nm at GLOBALFOUNDRIES. On a unit basis …
