Focused Ion Beam
Focused Ion Beam news and technical articles from Solid State Technology Magazine. Search Focused Ion Beam latest and archived news and articles
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FEI, Hitachi High-Tech settle focused ion beam patent dispute
… 21, 2012 - FEI Co. and Hitachi High-Technologies Corp. (HHT) have agreed to settle an ongoing dispute over focused ion beam (FIB) technology patents. Under terms of the deal, FEI will make a one-time $15M payment, while HHT will dismiss …
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Focused Ion beam mask repair
Focused ion beam mask repair John C. Morgan, Micrion ..... now print as a defect on the wafer. Focused ion beam (FIB) tools were typically used to ..... and discusses future requirements for focused ion beam repair. Present mask technology Chrome …
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Focused ion beam
Focused ion beam
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TESCAN combines nano-analysis tools in one platform
… 2011 - BUSINESS WIRE -- TESCAN introduced the LYRA GM focused ion beam and scanning electron microscope (FIB--SEM) workstation ..... instrumentation, such as Electron Microscopes and Focused Ion Beam workstations. Learn more at www.tescan.com
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FEI launches top-of-the-line research DualBeam at M&M
NanoCon Newswire July 31, 2006 (Hillsboro, Ore.) -- The next generation of combined focused ion beam (FIB) and scanning electron microscope (SEM) technology for research will be unveiled today when FEI Company (Nasdaq: FEIC …
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2013: Accelerating R&D and decreasing time to yield
… structures with critical dimensions of a few tens of nanometers. Equally important, it has also driven demand for the focused ion beam /scanning electron microscope (FIB/SEM) systems needed to create ultrathin samples from precise locations on …
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FEI introduces Helios NanoLab 450 F1 DualBeam for failure analysis
… memory structures. Dual beam instruments combine an SEM (scanning electron microscope) for imaging and a FIB ( focused ion beam ) for milling and deposition. Dual beams also provide STEM imaging capability by adding a detector for collecting …
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FEI plasma FIB tool suits MEMS, 3D packaging
By Debra Vogler, senior technical editor June 13, 2011 -- FEI launched its Vion plasma focused ion beam (PFIB) system based on inductively-coupled plasma (ICP) source technology using a xenon ion beam. The system generates more …
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Semiconductor metrology beyond 22nm: 3D memory metrology
… Advisory Group (AMAG). Aaron Cordes is a research engineer for Sematech in Albany doing work on AFM, TEM, and focused ion beam metrology. He is also a PhD student with SUNY Albany’s College of Nanoscale Science and Engineering. Victor …
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Conference Report: MRS Spring 2012, Day 4
… to take it to $0.01/kWh in 3-5 years. II11.4 Daniel Collins of U Victoria (Canada) walked us through a focused ion beam (FIB) method for fabricating 2D and 3D graphene junctions with graphite that is non-destructive to the extremely …
