Finfet
Finfet news and technical articles from Solid State Technology Magazine. Search Finfet latest and archived news and articles
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Imec: FinFET beat planar for bigger SRAMs
… arrays (>128-512KB), FinFETs "clearly outperform planar ..... lower, for undoped SOI FinFET ), and lower VCC min than planar. Undoped SOI FinFETs allow a 90% yield at 0 ..... higher voltages, imec says. FinFET SRAM cell. (Source: imec …
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Semiconductor metrology beyond 22nm: FinFET metrology
… Diagram of a basic unit cell of a FinFET , demonstrating twelve important ..... the increased complexity of FinFETs . While CD-SEM demonstrates ..... Scatterometry is useful for FinFET metrology, but greater parameter ..... measurement performance on FinFETs , including new technologies …
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Plasma etch challenges for FinFET transistors
… constraints and challenges associated with FinFET manufacturing are reviewed from the etch ..... As the industry moves to 3D tri-gate FinFET architectures to overcome transistor scaling ..... planar transistors, the performance of FinFET devices will depend more on etch because …
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ASM covers FinFET precursor needs from epitaxy to HKMG ALD
… marketing, thermal products, discussed the challenges of making FinFET structures using both epitaxial and high- k /metal gate (HKMG ..... will drive ALD reqs, he said. The bigger transition with the FinFET structure will be the metal gates; the work function depends …
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IEDM 2011: FinFETs for sub-20nm SoCs
… something with various sub-20nm FinFET architectures. In this one ..... interactions in fully depleted FinFETs for ≤14nm targeting future ..... for 14nm and Beyond with 3D FinFET Transistors for the Future ..... Invited)] Next slide: Mapping FinFET carrier profiles in 3D Previous …
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SEMICON West 2011, Day 1: SOI vs. FinFET , ReRAM vs. 3D NAND, and lots of video data
… silicon-on-insulator (SOI) and FinFET technologies was much in evidence ..... research agency IMEC made the case for FinFETs , while Ali Khakifirooz of IBM Research ..... Biesemans noted that Intel’s new 22nm FinFET design required an 11-year R&D …
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IEDM 2011: Mapping FinFET carrier profiles in 3D
… what's going on inside a FinFET structure, IMEC researchers ..... the 3D carrier profiles of FinFETs (2-3nm resolution) using ..... 3D-Carrier Profiling in FinFETs Using Scanning Spreading Resistance ..... copper 3D TSVs Previous slide: FinFETs for sub-20nm SoCs
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Samsung, IBM and GlobalFoundries look to the future: A report from the Common Platform Technology Forum
… FinFET mobile devices. At 14nm FinFET , you need 100 WPH (wafers ..... 3D device integration. SOI FinFETs were pioneered by IBM, while ..... led the development of bulk FinFETs ; the Common Platform supports bulk FinFET . SOI FinFET is used by IBM for server …
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CEA-Leti Annual Review: IDMs' top 3 challenges
… them, is driving advanced CMOS technology development, he said. The three primary challenges for IDMs are the transition to FinFET as a probable standard from the 14nm node, the adoption of EUV lithography, and the transition to 450mm wafer size. Concerning …
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Common Technology Platform Forum looks to the future
… FinFET mobile devices. At 14nm FinFET , you need 100 WPH (wafers ..... 3D device integration. SOI FinFETs were pioneered by IBM, while ..... led the development of bulk FinFETs ; the Common Platform supports bulk FinFET . SOI FinFET is used by IBM …
