Etching
Etching news and technical articles from Solid State Technology Magazine. Search Etching latest and archived news and articles
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Load-locked etching system
Load-locked etching system The RIE-200 iP load-locked etching system uses the latest inductively coupled plasma technology to perform high-speed, 0.25-?m etching of the thin films used in ULSI processing. The system …
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Companies Collaborate for Etching Tool Suite
… creates plasma process technologies, have released a suite of etching tools specific to MEMS, combining STS and XACTIX products ..... etch systems enable unconventional processes, "such as etching after package insertion and wire-bonding," says David Springer …
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April 2005 Exclusive Feature: Etch Plasma etching using an ICP etcher
… Kanagawa, Japan Highly selective SiO 2 etching plasma processes increasingly are required ..... scale integrated circuits, where deep etching of silicon oxide (oxide) layers involves ..... special mechanisms of plasma chemical etching [1-3], it is difficult to etch high …
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SEERs-based process control and plasma etching
… semiconductor production, particularly in plasma etching . Practical implementation is via self ..... the substrate being etched. In plasma etching , this is important for simultaneous control ..... allows simultaneous determination of an etching plasma`s average electron density …
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In situ wafer temperature measurement during plasma etching
… one of the hidden parameters in plasma etching that has a significant impact on process ..... Monitoring wafer temperature in plasma etching is a significant challenge, given the ..... chuck (ESC). We studied passivation etching of openings over bonding pads, monitoring …
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Plasma Etching System
The PE-2000R roll-to-roll plasma etching system is capable of processing various types of polymeric materials with varying width, thickness and substrate composition …
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Honeywell buys Unaxis' MEMS etching system
Feb. 18, 2003 -- Honeywell International Inc. bought plasma etching equipment for advanced MEMS manufacturing from Unaxis Semiconductors , according to a news release. Honeywell installed Unaxis …
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Clean cycle prediction in etching processes via direct plasma control
… Systems USA, San Jose, California Gary Skinner, Altis Semiconductor, Essonnes, France overview Plasma processes such as etching are typically controlled with machine parameters, but direct real-time monitoring of the plasma provides added insight and …
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Nanoplas introduces a new class of dry-etching technology
… Nanoplas’s new Atomic-Layer Downstream Etching (ALDE) processing allows etching rate and selectivity to be controlled independently ..... Nanoplas’s Atomic-Layer Downstream Etching technology enables a new class of plasma-based …
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Through-wafer Via Etching
… alternative. Silicon Deep Reactive Ion Etching Given the challenges facing wire bonding ..... wafer vias are micromachined by dry etching , and subsequently filled with metal, they ..... real estate.” Through-wafer plasma etching processes are widely used in mass production …
