Etching Tools
Etching Tools news and technical articles from Solid State Technology Magazine. Search Etching Tools latest and archived news and articles
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XACTIX, STS unveil line of xenon difluoride silicon etch systems
… 2006 - XACTIX Inc. and Surface Technology Systems PLC announced a comprehensive line of production-oriented release etching tools for MEMS. The tools produced under this collaboration use xenon difluoride gas to perform a highly selective isotropic …
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Companies Collaborate for Etching Tool Suite
… equipment provider, and Surface Technology Systems, who creates plasma process technologies, have released a suite of etching tools specific to MEMS, combining STS and XACTIX products. The xenon difluoride silicon-etch systems enable unconventional …
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STS sharpens its MEMS tools to carve a niche in industry
Click here to enlarge image Aug. 4, 2003 -- Surface Technology Systems plc , a respected supplier of deep- etching tools to MEMS researchers, is now ready to serve the market for full-scale MEMS production. It just hopes the market …
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LED manufacturing equipment status report
… already contributed significantly to cost reduction in lithography, plasma, and PVD processing. The market for dry etching tools is still growing in 2012 due to increasing adoption for patterned sapphire substrates (PSS). Most lithography tools …
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Unlocking laser tools' potential in c-Si cell fabs
… with the dip in 2009 due to (i) the pause in capacity from market oversupply, and (ii) an increase in wet- etching tools used for junction isolation. Similar revenue projections have been presented during the past 12 months [31-33 …
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Unlocking laser tools' potential in c-Si cell fabs
… with the dip in 2009 due to (i) the pause in capacity from market oversupply, and (ii) an increase in wet- etching tools used for junction isolation. Similar revenue projections have been presented during the past 12 months [31-33 …
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Technology news
… significantly increase its throughput, and major tool suppliers now developing it further are on track to have 100µm/min etching tools on the market within two to three years. The relatively slow speed of etching out deep features remains a bottleneck …
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Bosch: Deep etch tools on target for 100µm/min throughput in 2-3 years
… significantly improve its throughput, and major tool suppliers now developing it further are on track to have 100µm/min etching tools on the market within two to three years. The relatively slow speed of etching out deep features remains a bottleneck …
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Lam profit doubles, but outlook more cautious
… company president/CEO Steve Newberry said he expects flat capital spending for the company's core business of etching tools , and warned of a 5%-7% sequential decline in 1Q07 (vs. earlier-projected 5%-10% increase) due to customer …
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Intracavity laser spectroscopy for real-time trace gas detection
… manufacturing, especially for in situ applications on wafer-processing tools within lithography chambers or in plasma- etching tools , often depends on its capability to provide an idealized set of performance characteristics. It must be automated …
