Etching Equipment
Etching Equipment news and technical articles from Solid State Technology Magazine. Search Etching Equipment latest and archived news and articles
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Etching equipment /accessories
Etching equipment /accessories
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Bosch: Deep etch tools on target for 100µm/min throughput in 2-3 years
by Dr. Paula Doe, Contributing Editor Deep etching equipment is about to make a big jump in throughput, according to Franz Laermer, corporate sector research and advanced engineering at …
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Alcatel receives DRIE systems order from CMOS image sensors foundry Xintec
Oct. 9, 2006 -- Alcatel Micro Machining Systems , an Annecy, France, supplier of deep silicon etching equipment (DRIE) for MEMS and 3D Semiconductors, announced that it has received a multi-million dollar order from Xintec Inc. in Taiwan …
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SEMICON West 2011: New product roundup
… polyimide material is used in structural components (e.g. insulators, isolators, and retainers) in plasma etching equipment , such as plasma enhanced chemical vapor deposition (PEVCD), and high-density plasma chemical vapor deposition …
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Frontend process, materials firms get high marks from TSMC
… Tokyo Electron Ltd. -- Excellent delivery support Lam Research -- Excellent technology development collaboration, etching equipment KLA-Tencor -- Excellent performance, mask inspection equipment SUMCO -- Excellent performance, silicon wafer …
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Plasma Etch Inc
Manufactures plasma etching equipment . Cleans organic contamination from nearly all substrates, improving coating uniformity, adhesiveness, and bond strengths. Complete system customization and contract plasma service available.
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Unlocking laser tools' potential in c-Si cell fabs
… for the majority of standard c-Si cells produced to date: diffusion furnaces, deposition tools, wet and dry etching equipment , metallization tools, and screen-printers. Production lines traditionally have been readily configured using …
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What's brewing in AMEC-Lam etch IP dispute?
… The backstory: Lam initially filed suit against AMEC in early 2009 alleging that AMEC's Primo D-RIE dielectric etching equipment infringed upon Taiwanese patents about confinement rings , and focus rings in plasma reactors; AMEC responded on …
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Unlocking laser tools' potential in c-Si cell fabs
… for the majority of standard c-Si cells produced to date: diffusion furnaces, deposition tools, wet and dry etching equipment , metallization tools, and screen-printers. Production lines traditionally have been readily configured using …
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Crystalline Si solar cells and the microelectronics experience
… infrastructure (essentially, epitaxial and porodization process tools would substitute the diffusion and doped glass etching equipment in standard fabs). For non-integrated solar cell manufacturers, the epi-cell approach has an additional bonus …
