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Tokyo Electron Ltd. -- Excellent delivery support Lam Research -- Excellent technology development collaboration, etching equipment KLA-Tencor -- Excellent performance, mask inspection equipment SUMCO -- Excellent performance, silicon wafer
polyimide material is used in structural components (e.g. insulators, isolators, and retainers) in plasma etching equipment , such as plasma enhanced chemical vapor deposition (PEVCD), and high-density plasma chemical vapor deposition