Etch Silicon
Etch Silicon news and technical articles from Solid State Technology Magazine. Search Etch Silicon latest and archived news and articles
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The changing art of measuring vacuum pressure
… great benefit to the semiconductor industry. An uncoated silicon pressure sensor on a vacuum chamber that is used to etch silicon will not last long, since the etchants will not only etch the wafer but will also etch the Si-MEMS sensor. Additionally …
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New Products
… aol.com Mass flow controller The Tylan UHP2000 thermal mass flow controller is designed for such processes as metal etch , silicon nitride, CVD, and other applications that produce condensable or particle by-products. An all-metal flowpath …
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Etec five-year effort may result in direct-write lithography offering
… The process uses a proprietary etchant gas that, unlike xenon difluoride, is nontoxic and does not spontaneously etch silicon . (This SEM image compares unetched and Delineation Etched regions on the same sample.) "The results are equivalent …
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SST editors ask industry experts about advanced wafer-cleaning evolution
… that it will not etch the silicon substrate, whereas the SC1 portion of the standard RCA clean has long been known to etch silicon . Two vital concerns with silicon etching are the carrier mobility and channel doping — silicon etching will degrade …
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Optimizing plasma etch for MEMS devices
… atomic fluorine proceeds spontaneously in a classic "chemical" etch. CF 4 , SF 6 , and other fluorine sources will etch silicon rapidly, but with a propensity to etch isotropically, resulting in undercut from the original etch mask. Manufacturing …
