Etch Processes
Etch Processes news and technical articles from Solid State Technology Magazine. Search Etch Processes latest and archived news and articles
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Plasma etch challenges for FinFET transistors
… Shallow trench isolation (STI) etch processes for conventional planar devices ..... most challenging of the FinFET etch processes . Challenge of atomic-precision ..... E > 0, and values for current etch processes typically range from approximately …
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SPTS sends dry MEMS etch tool to China research institute
… attack on exposed surfaces. The Primaxx Monarch 3 uses a 3-wafer process module for higher throughput and repeatable etch processes . SPTS’ HF vapor etch technology reportedly prevents stiction, which occurs during wet etch when the released microstructure …
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KLA-Tencor enlarges monitor-wafer suite
… process excursions, and track manufacturing trends. ET-SE delivers temperature wafer monitoring during silicon etch processes , providing temperature measurements with a higher signal-to-noise ratio than alternative methods. ET-SE assists …
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Semiconductor process technology challenges at 22nm
… The number of electrons on the gate continues to shrink, making reliability and repeatability of deposition and etch processes critical to NAND yields. 2xnm and 1xnm NAND are expected to be roughly 4% of the 19,000 Petabytes total production …
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Mass flow controller from Brooks Instrument gains safer delivery
… GF120 SDS is a low-pressure drop mass flow controller that delivers sub-atmospheric SDS gases used in implant and etch processes . Sub-atmosphereic SDS gases are adsorbed onto a solid medium within the gas cylinder, remaining below atmospheric …
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AVS Symposium 2011: A pre-show highlight reel
… control, feature level uniformity, plasma microdamage); a dry etching process for phase-change memory; selective etch processes for magnetic materials (Ni, Co, Ta) High- k dielectrics ( two parts ): High mobility channel materials beyond …
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Improved post-etch metal and oxide residue removal yields
… residue that can result from certain metal and oxide etch processes . A wider bath process temperature range gives engineers ..... drift prior to the cleaning step. In certain cases, etch processes prior to cleaning can generate excess polymer residues …
