Epitaxy
Epitaxy news and technical articles from Solid State Technology Magazine. Search Epitaxy latest and archived news and articles
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Measurement of carrier lifetime: Monitoring epitaxy quality
… processes of generation-recombination in the epitaxy layers on silicon, also accounting for ..... new, in-line monitoring technique for epitaxy quality via lifetime measurement. This ..... our work, we studied 10mm of n-doped epitaxy on an n-substrate, matching our current …
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ASM debuts 300mm epitaxy and PEALD/PECVD tools for HV transistor fab
… Amsterdam:ASM), launched advanced deposition systems for epitaxy , plasma-enhanced atomic layer deposition (PEALD), and ..... wafer Epi process tool that can be configured with up to four epitaxy reactor modules. The Intrepid XP deposits advanced strained …
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Translucent demos LED growth via one-step epitaxy with rare earth oxides on Si
… one-step light emitting diode (LED) epitaxy on large-diameter wafers. Translucent ..... layer that can support further nitride epitaxy for LED structure growth. The GaN-on ..... material was grown using molecular beam epitaxy (MBE) reactors at Translucent’s …
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Dow Corning orders AIXTRON epitaxy reactors for power electronics fab
… planetary reactor platforms to its silicon carbide (SiC) epitaxy capacity for next-generation power electronics . The AIXTRON ..... electronics group offers high-quality silicon carbide wafers and epitaxy services, using proprietary crystal growth methods and precision …
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imec studies molecular beam epitaxy for advanced CMOS on high-mobility compound semiconductors
March 13, 2012 -- Molecular beam epitaxy equipment supplier Riber will work with research organization imec on epitaxy process technologies for next-generation III-V semiconductor CMOS devices. Within imec’s Germanium and III-V devices …
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TEL silicon carbide (SiC) epitaxy tool ordered by Infineon
March 16, 2012 -- Infineon Technologies (Germany) ordered the Probus-SiC silicon carbide (SiC) epitaxy film growth tool from Tokyo Electron Limited (TEL). It will be used to mass produce advanced SiC power devices . The Probus …
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GlobiTech Launches CMOS Epitaxy Foundry
SHERMAN, TX The notion of sharing risk is giving epitaxy specialists like start-up GlobiTech's dedicated CMOS epitaxial foundry a viable niche in the chip making business. While semiconductor …
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ASM, IHP cooperate on SiGe:C epitaxy technology
… Microelectronics, a German development center for semiconductor technology, to commercialize silicon germanium carbon (SiGe:C) epitaxy technology, a process initially developed by IHP. The process allows extremely high-speed SiGe:C heterojunction bipolar …
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MOCVD and MBE epitaxy trends for compound semiconductors
… deposition (MOCVD) and molecular beam epitaxy (MBE) represent essentially 100% of ..... LED GaN - MOCVD). SOURCE: III-V Epitaxy Equipment & Applications Market report, April ..... Epistar, Epiworks First Nano, Formosa Epitaxy , Freiberger, Fujiepi, Furukawa, GCS …
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Precursors for group IV epitaxy for micro/opto-electronic applications
… creating a uniaxial tensile stressor via epitaxy in the source/drain region of transistors ..... the adjacent channel region. However, epitaxy of Si:C is much more challenging than SiGe ..... precursor for low temperature selective epitaxy of silicon based films. Epitaxial processes for …
