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  1. Silicon interposers: building blocks for 3D-ICs

    Article

    Wed, 1 Jun 2011

    circuitry of each active chip internal to the device package, reducing the need for HBM (human body model) electrostatic discharge (ESD) protection circuits and guard rings. Using a silicon interposer also makes it easier to "mix and match

  2. Compact workcell kits 600 wafers in cleanroom conditions

    Article

    Wed, 17 Aug 2011

    incorporates clean air fan filters and ionizer features to store wafers that are very sensitive to damage from electrostatic discharge (ESD). Each basic workcell holds 4 modules (600 wafers). The WaferMate300-2SS can sort or stock wafers

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