Dry Etching
Dry Etching news and technical articles from Solid State Technology Magazine. Search Dry Etching latest and archived news and articles
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CCD-controlled in situ interferometry for dry etch process monitoring
… reflectivity measurements during dry etching is presented. The method is based ..... control of etch depth and rate during dry etching . It can also be used to control ..... Fig. 2. For in situ control of dry etching , the reference markers are set …
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GlobalFoundries to fab Sand 9's MEMS timing products
… releases the resonator structure -- having the buried cavity enables this release to be done "very fast and clean" using dry etching , the company explains, since no sacrificial layer or wet etching chemistry means one less time-consuming material …
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LED manufacturing equipment status report
… lithography, plasma, and PVD processing. The market for dry etching tools is still growing in 2012 due to increasing adoption for ..... equipment market, including MOCVD, lithography, dry etching , PECVD and PVD tools. Companies cited in the report …
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Cell assembly: Low cost, continuous and ecological foil cleaning process for photovoltaics
… been interest in atmospheric plasma systems as efficient dry etching , surface cleaning and adhesion promotion process tools ..... to atmospheric pressure plasma processes are therefore dry etching , surface cleaning, etching, and activation. Layer reductions …
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AVS Symposium 2011: A pre-show highlight reel
… packaging for MEMS; Plasma etch challenges (profile control, feature level uniformity, plasma microdamage); a dry etching process for phase-change memory; selective etch processes for magnetic materials (Ni, Co, Ta) High- k dielectrics …
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FTIR spectrometers measure scrubber abatement efficiencies
… were a part of the study include dry etching , ion implantation, thermal diffusion ..... coming from a thin-film or a dry etching process. Based on in situ measurement ..... treat the exhaust gases from a dry etching process. The on-site test results …
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MoSi-ing along to 32nm
… chrome overcoat that functions as a hard-mask in the dry etching process before being removed. The opaque MoSi itself ..... transparent doped material for attenuated-PSMs. Dry etching became ubiquitous for Att-PSM production and the deficiencies …
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MoSi-ing along to 32nm
… chrome overcoat that functions as a hard-mask in the dry etching process, before being removed. The opaque MoSi itself ..... transparent doped material for attenuated-PSMs. Dry etching became ubiquitous for Att-PSM production and the deficiencies …
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IBM, ETH Zurich nanotechnology research center opens -- custom-built for nanoscience research
… provides scientists from IBM and ETH Zurich with a flexible environment and tools for lithography, wet processing, dry etching , thermal processes, thin-film deposition or metrology and characterization. The cleanroom also features a special …
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Unlocking laser tools' potential in c-Si cell fabs
… equipment used for the majority of standard c-Si cells produced to date: diffusion furnaces, deposition tools, wet and dry etching equipment, metallization tools, and screen-printers. Production lines traditionally have been readily configured …
