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company is led by a team of semiconductor equipment experts from Silicon Valley and Asia. The extreme challenges of dry etching at 20nm and below has virtually excluded small etch players from the vendor pool, allowing just a few companies to
Nanoplas, a global supplier of plasma processing equipment to the semiconductor industry, today announced a new dry-etch process offering virtually unlimited etch selectivity for removing dielectric films on microprocessors and memories at high throughput.
fundamentally improving the inherent roughness of this process [1–3]. We have also characterized various silicon dioxide dry etching processes that provide through-wafer capability at higher etch rates and aspect ratios than previously reported
T. Lill, Applied Materials Dry etching is essential for high-performance ..... gate applications, and explores dry etching options to meet these requirements ..... k etch studies, both wet and dry etching techniques were investigated
3D Chip quality by Remote Cold Dry Etching BY PETER HEINZE, PH.D., MARTIN ..... front-side chipping removal by dry etching . 6 The reverse-bending test ..... has been etched by remote cold dry etching . The length of the metal vias can
film deposition, corrosive chlorine (Cl 2 ) for dry - etching , and toxic arsine (AsH 3 ) for ion implantation ..... detects leaking gases from different processes (e.g., dry - etching , CVD, diffusion, and photo). With the assistance of the GLDS, the
Despite the success of some dry - etching processes, wet etching remains a staple in semiconductor device fabrication, as well as in many other related technologies
11, Austin, Texas Mohamed Boumerzoug, Motorola MOS-12, Phoenix, Arizona overview Photoresist removal following dry etching or high-dose ion implantation conventionally employs solvents and acids, sometimes preceded by a dry oxygen-based
An important lesson for MEMS devicemakers to learn from the semiconductor industry's improvements in process capabilities to reduce unit production costs, is understanding why single-wafer processing -- specifically, dry etching -- remains the technique of choice for high-throughput, high-yield ...
Silicon Valley, a hub of company research centers and ventures. The new laboratory is equipped with SAMCO CVD systems, dry etching systems , cleaning systems, and a suite of thin-film measurement systems. Research will continue on thin films of