Dielectric
Dielectric news and technical articles from Solid State Technology Magazine. Search Dielectric latest and archived news and articles
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AMEC installs dielectric etch tool in China for 28nm fab
March 20, 2012 -- Advanced Micro-Fabrication Equipment Inc. (AMEC) installed a second-generation dielectric etch tool, the Primo AD-RIE , at Chinese foundry SMIC. It is the first time AMEC has installed the Primo AD-RIE in China …
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DuPont LTCC material suits 50GHz+ electronics
… packaging material, offering good dielectric constant properties for higher speed ..... applications. GreenTape 9K5 LTCC has a dielectric constant of 5.80 (at 10 GHz), compatible ..... showcase the product and present on LTCC dielectric characterization for high-frequency …
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ALD enables 3D capacitors for CEA-Leti and IPDiA
… organization CEA-Leti and passive component maker IPDiA developed an atomic layer deposition (ALD) process to apply medium- k dielectric layers on a metal-insulator-metal capacitor architecture, enabling 3D capacitors . The project took less than 2 years …
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Parylene protects MEMS assemblies
… structures and superior thermal, UV and dielectric protection. While parylene has been ..... application of liquid coatings, thus dielectric properties are never compromised. The ..... integrated devices (Fig. 3); Low dielectric constant and dissipation factor: parylene …
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Novellus uncrates conformal films for sub-2Xnm
… Conformal Film Deposition (CFD) suite of dielectric films consists of oxide, doped oxide ..... cores, and through silicon via (TSV) dielectric liners. The films do not exhibit pattern ..... reducing overall field thickness of the dielectric . Learn more at http://www.novellus …
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AMAT debuts full-vacuum gate stack tool for 22nm chip fab
… Gate Stack system for creating gate dielectric structures in 22nm logic chips. It ..... Integrated Gate Stack system to build the dielectric film stack atomically, based around ..... time. By fabricating the entire gate dielectric stack under vacuum, the Centura system …
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Nanowire-based charge-trapping memory optimized by NIST, GMU
… characteristics of silicon nanowires and dielectric stacks for charge-trapping memory ..... nanowires, which must be surrounded by thin dielectric layers that store electrical charge ..... NIST and GMU team through a range of dielectric structures to optimize device design …
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Nanowire-based charge-trapping memory optimized by NIST, GMU
… characteristics of silicon nanowires and dielectric stacks for charge-trapping memory ..... nanowires, which must be surrounded by thin dielectric layers that store electrical charge ..... NIST and GMU team through a range of dielectric structures to optimize device design …
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Fraunhofer IZM's packaging center installs Altatech CVD
… deposition (CVD) tool. The AltaCVD 300 deposits conformal dielectric liners inside through silicon vias (TSV) in die stacks for ..... with hole diameters as small as 10µm. ASSID can deposit the dielectric films with high-pressure CVD and plasma-enabled CVD …
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Jenoptik femtosecond laser suits semiconductor, PV ablation steps
… to ablate thin layers from semiconductor wafers and remove dielectric layers on photovoltaic solar cells , and perform other materials ..... thin layer ablation in the semiconductor industry removal of dielectric layers on crystal solar cells in photovoltaics scribing of …
