Dielectric
Dielectric news and technical articles from Solid State Technology Magazine. Search Dielectric latest and archived news and articles
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Fluorine plasma chemistry for high-AR dielectric etching
… sizes continue to shrink, anisotropic dielectric etching faces a daunting list of challenges ..... helping to enable anisotropic etching of dielectric materials. The transition to 193nm ..... more stringent requirements for the dielectric -to-resist etch selectivity. Dielectric …
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How dielectric T g affects substrate performance
… Transitions in polymer mechanical and dielectric properties accompany glass transition ..... here to enlarge image When choosing a dielectric material, there are various factors ..... packaging designer should consider. Dielectric dissipation and partial discharge of …
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Low- k dielectric integration cost modelling
… Coast Editor The wide variety of low- k dielectric materials and processes for ULSI interconnection ..... generic cost-per-wafer (CPW) model for dielectric deposition (not including the costs of dielectric CMP, metallization, or lithography …
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Low-k dielectric costs for dual-damascene integration
Low-k dielectric materials and processes for ULSI interconnection ..... to a generic cost-per-wafer (CPW) model for dielectric deposition (not including the costs of dielectric CMP, metallization, or lithography). Despite …
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A carbon-restoring silylation process for low-k dielectric repair
… silicate glass (OSG) based low- k dielectric materials are widely used to minimize ..... in the degradation of the film’s dielectric properties as well as other issues such ..... for repairing carbon damaged low- k dielectric materials is through the use of a silylation …
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High-k gate dielectric applications using ALD Hf-based oxides
… challenges to the integration of high-k dielectric materials. The hydroxyl ion, OH ..... prevailing impurity in H 2 O-based high-k dielectric films and a major source of fixed and ..... is below 10 -7 A/cm 2 , a high-k dielectric film — one which is thermally stable and …
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Understanding hydrogen silsesquioxane-based dielectric film processing
… Understanding hydrogen silsesquioxane-based dielectric film processing Mark J. Loboda, George ..... HSQ-based films routinely provide dielectric constants lower than PECVD silicon dioxide ..... In addition, HSQ offers a lower dielectric constant (k <3.0) than standard …
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UV-assisted processing for advanced dielectric films
… modification technology for advanced dielectric applications. As a post-deposition process, UVTP enhances dielectric film properties by combining UV photon ..... strength and adhesion of low- k dielectric films. To improve device performance …
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Meeting ITRS Roadmap challenges with low- k dielectric etching
… overview The integration of low- k dielectric materials has proven to be a significant ..... at least several years. Figure 1. Dielectric etch process for a) subtractive aluminum ..... copper dual damascene. The barrier dielectric is removed following stripping of PR …
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Dielectric anti-reflective coatings for DUV lithography
Dielectric antireflective coatings for DUV lithography ..... chemical vapor deposition (PECVD) dielectric antireflective coatings (ARC) can ..... applications. This paper demonstrates how a dielectric ARC was designed for aluminum metallization …
