Di Water
Di Water news and technical articles from Solid State Technology Magazine. Search Di Water latest and archived news and articles
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LED maker orders multiple fab tools from OEM Group
… HydroOzone post-ash clean eliminates thousands of gallons of sulphuric acid and hydrogen peroxide, reduces deionized ( DI ) water consumption by 84%, reduces cycle time and defects, and increases yields, the company reports. The Cintillio SAT …
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EVG wafer clean tool installed at Tokyo Institute of Technology
… EVG301 performs wafer cleaning for various wafer bonding processes. Its one cleaning station uses standard deionized ( DI )- water rinse as well as megasonic, brush and diluted chemicals as additional cleaning options. It offers manual loading and …
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Hamilton sensor measures semiconductor process water conductivity without transmitters
… modbus interfaces, eliminating transmitters from the design and improving transmission reliability. Also read: Reducing DI water use The Conducell PWSE joins Hamilton's other ARC sensors, introduced in 2010, for pH, dissolved oxygen and conductivity …
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Undiluted slurry data improves CMP metrics
… probability for finding a few large particles, when using only a few micro liters of slurry mixed with >1000X the volume of DI water (DIW) – reduces the LPC visibility to near-zero. Also, dilution of the slurry can affect its pH, its zeta potential …
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CMP metrics improved by undiluted slurry data
… probability for finding a few large particles when using only a few micro liters of slurry mixed with >1000× the volume of DI water (DIW) reduces large particle count (LPC) visibility to near-zero. Also, slurry dilution can affect its pH, its …
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ICPT 2011: Familiar CMP themes expand to new apps, interactions
… overpolish time was a factor in the shift of k eff value. The audience was also reminded of the importance of controlling DI water rinsing following the use of today's highly chemical slurries. As expected, there were multiple papers looking at …
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Fraunhofer reaches back-contact Si solar cell efficiencies over 20% using RASIRC Steamer
… generating ultra high purity steam from DI water . Fraunhofer used ultrapure water ..... impurities from steam generated from DI water . This increases solar cell fab yields ..... UHP) steam from de-ionized ( DI ) water . Learn more at www.rasirc.com …
