Device Wafer
Device Wafer news and technical articles from Solid State Technology Magazine. Search Device Wafer latest and archived news and articles
-
Imec's via-middle TSV fab 'reveals' contacts by wafer thinning/etch
… handling, especially for thinned wafers (down to 50µm). To achieve the <2µm variation in wafer thickness, the device wafer is bonded to a carrier wafer prior to wafer thinning, via a temporary adhesive. Once backside processing is complete …
-
Defect removal using dry cryogenic aerosols
… PRE values on a blanket test wafer are a critical metric and serve as a guide to estimate the final defect count on a device wafer after processing. Using these PRE values, the average remaining defect count is expected to be less than two for particles …
-
Shin-Etsu Chemical joins EVG wafer bonding supply chain
… proven adhesive platforms; and the ability to debond at room temperature with virtually no vertical force applied to the device wafer . Strong adhesion occurs at the edge (perimeter) and minimal adhesion is applied to the wafer center, supporting …
-
Dual-beam laser spike annealing for advanced logic applications
… uniformity for a nickel silicide device wafer , calculated from measured reflectance ..... pattern density variations on the device wafer can cause large within-die ..... effects, we took an advanced logic device wafer pulled from the line at the second …
-
Brewer Science, EVG commercialize temporary wafer bonding with zoning laws
… and existing adhesive platforms. Debonding can take place at room temperature with virtually no vertical force on the device wafer . ZoneBOND defines 2 carrier wafer zones, with strong perimeter adhesion and minimal center adhesion. This allows …
-
-
LED makers shifting focus from efficacy to manufacturing efficiency for mass-market leap
… director of the LED/energy business unit at Brewer Science. That requires a solution for temporary bonding the device wafer to a carrier substrate so it survives handling and processing without damage. Debonding choices range from chemical …
