Deposited On The Wafer
Deposited On The Wafer news and technical articles from Solid State Technology Magazine. Search Deposited On The Wafer latest and archived news and articles
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Undiluted slurry data improves CMP metrics
… particular fab's slurry delivery system to calculate the quantified shear-stress induced on slurry before it is deposited on the wafer is just one factor. Deciding on how to emulate and simulate the degree of shear-stress on new slurry during …
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CMP metrics improved by undiluted slurry data
… particular fab's slurry delivery system to calculate the quantified shear-stress induced on slurry before it is deposited on the wafer is just one factor. Deciding on how to emulate and simulate the degree of shear-stress on new slurry during …
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Tokyo-Electron-Tanaka-Kikinzoku-Kogyo-recycle-discarded-CVD-ruthenium-precursors
… Tokyo Electron Limited developed the recovery system, which collects residue of the ruthenium-CVD precursor not deposited on the wafer , and Tanaka Kikinzoku Kogyo K.K. developed the process to refine and re-use the collected ruthenium precursors …
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Silicon remains a contender in flexible electronics
… manufacturing is subtractive. It alternates deposition and etch or CMP steps, ultimately removing much of the material deposited on the wafer . Printing processes can combine deposition and patterning in a single step. The greatly simplified process sequence …
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SEZ and Air Liquide team to develop etch solutions for advanced metal-gate materials
… technology." One side effect of both ALD and chemical vapor deposition (CVD) techniques is that film material is deposited on the wafer backside. Contamination from these films can be transferred to other wafers through shared handling, and the …
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Targeting 45nm with improved SiON films and extended gate dielectrics
… temperature to improve the bonding within the oxynitride and improve the interface quality. Finally, polysilicon is deposited on the wafer to seal the finished gate dielectric, which prevents any additional thickening in the ambient environment. Other …
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Evaluating the effects of internal gettering in epi Si
… polysilicon external gettering, the impurities are gettered by the grain boundaries of a polycrystalline silicon layer deposited on the wafer backside. High-boron-concentration activated gettering applied to Fe is due to the electronic interactions …
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Known Good Die: A Closer Look
… usually understood to incorporate a full wafer contactor, either a probe card or sacrificial layer of metal that is deposited on the wafer and then removed (Figure 2). Input nodes on each chip may then be “toggled” to exercise the devices. The …
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Enhancing yield with flux and solder paste process control
… attach, BGA spheres are attached directly to an uncut wafer. A stress compensation layer (SCL) is typically deposited on the wafer to eliminate the need for underfill and a substrate, and singulation is performed after the packaging process …
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Wafer Bump Reflow
… used to form a metallic interconnect phase between under-bump metallization and solder. After the solder is deposited on the wafer , the reflow process is used to form homogeneous solder spheres. The prevention of solder oxides during reflow …
