Deposited On The Wafer
Deposited On The Wafer news and technical articles from Solid State Technology Magazine. Search Deposited On The Wafer latest and archived news and articles
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Metallization processes for standardized wide-IO memory applications
… hole is then filled with a copper plating solution. A CMP step is typically performed to remove the overburden deposited on the wafer flat by the previous steps. TSVs for wide IO standard applications are mainly of the via-last type. For such …
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Undiluted slurry data improves CMP metrics
… particular fab's slurry delivery system to calculate the quantified shear-stress induced on slurry before it is deposited on the wafer is just one factor. Deciding on how to emulate and simulate the degree of shear-stress on new slurry during …
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CMP metrics improved by undiluted slurry data
… particular fab's slurry delivery system to calculate the quantified shear-stress induced on slurry before it is deposited on the wafer is just one factor. Deciding on how to emulate and simulate the degree of shear-stress on new slurry during …
