Defect
Defect news and technical articles from Solid State Technology Magazine. Search Defect latest and archived news and articles
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AMAT debuts SEM for automatic 20nm defect inspection
… Materials, Inc. debuted its defect review scanning electron microscope ..... analyze 20nm yield-limiting defects in a production environment ..... identifying and imaging relevant defects with 1nm pixel size, the SEMVision ..... pinpointing the root cause of defects faster and more accurately …
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KLA-Tencor wafer defect /metrology cluster tool monitors all wafer surfaces in parallel
… detects and bins macro defect types on the front side ..... particles to defocus defects spanning several die ..... resolution optical defect review and automated ..... back-side and edge defects , aid in defect source identification …
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KLAC debuts 20nm-node defect inspection system
… emerging LEDs The eDR-7000 can "re-locate and image 10nm defects " and oft-missed defect types, and can "review multiple defects per second," driving directly to the defect site at high resolution, said Cecelia Campochiaro, Ph.D …
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EUV Symposium: Updates on defects , resists, AIMS, and non-EUV NGL
… a few remaining defects . Current mask defect levels are expected ..... while lower mask defect levels are required ..... requirements. Amplitude defects are less frequent ..... roadmap for amplitude defects , and noted that ..... programmed amplitude- defect mask development …
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Ion beam optimization to reduce EUV mask blank defects
… cause of many of the defects seen on EUV mask blanks ..... implementation is the defect level of mask blanks ..... has the lowest proven defect level of any deposition ..... source of mask blank defects added during deposition ..... shows a stainless steel defect embedded inside the multilayer …
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Silicon germanium grown monolithically to avoid crystal defects
… Milano-Bicocca manufactured defect -free structures of different ..... thickness via this method. Crystal defects are eliminated due to this ..... integrations with continuous layers. Defect -free germanium structures ..... results. Applications for the defect -free monolithic structures …
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Nonvisual semiconductor defect metrology today, at 22nm, and below
… from Qcept Technologies explains his company's nonvisual defect inspection technology for logic and IC manufacturers, speaking ..... optical inspection will catch these, but other non-visual defects are becoming more prominent. Below 22nm, partnerships will …
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KLA-Tencor uncrates metrology line-up for leading-edge semiconductor wafers
… optical wafer defect inspection platform captures defects on challenging ..... e-beam wafer defect inspection platform ..... extremely small defects , shallow residues ..... optical wafer defect inspection platform ..... capture of small defects of interest on …
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Defect removal using dry cryogenic aerosols
… to estimate the final defect count on a device wafer ..... the average remaining defect count is expected to be ..... cleaning to remove fall-on defects created by in-line ..... modification. Figure 2. Defect maps before cryogenic ..... indicating the types of defects that are easily removed …
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Multi-depth imaging system shows defect progress
… and to see how features, including defects , change from one gate to the next. Shown ..... white regions in the acoustic image are defects . Small edge delaminations exist at Gate ..... widely used for nondestructive analysis of defects in industrial products and semiconductor …
