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device yield, yield management strategies must incorporate NVD inspection and review in a way that is analogous to physical defect inspection — both in-line to prevent excursions that can affect line yield, and in the lab to assist with root cause analysis and
Defect inspection technologies to meet the challenges ..... management using optical automated defect inspection is becoming increasingly important ..... prevalent sources of noise that impact defect inspection at post-CMP processing are layer
already in production. Rudolph’s NSX Series Macro Defect Inspection Systems help to reduce the manufacturing costs and time ..... Technologies Inc. designs, develops, manufactures and supports defect inspection , process control metrology, and data analysis systems
Tencor Corp. has unveiled its Teron 600 Series mask defect inspection systems. A programmable scanner-illumination capability ..... platform can also work with the TeraScan 500 Series reticle defect inspection systems in a mix-and-match strategy. According to
applications. The development effort involves the integration of defect inspection with a debonding tool. Manufacturing efficiencies, along ..... Technologies Inc. develops, manufactures and supports defect inspection , process control metrology, and data analysis systems
failures will be caused by defects that leave no detectable physical remnant”  based on the use of traditional defect inspection techniques. This new class of defects comprises mostly submonolayer residues that do not scatter light, thus making them
cleanliness of its phase masks using its in-house-developed defect inspection system. The system, Jessen says, is coupled with a cleanroom ..... retrained our employees," Jessen says. "As we are using our defect inspection system...to analyze various manufacturing steps, we
KLA-Tencor Corporation (NASDAQ:KLAC) launched the eDR-7000 electron-beam (e-beam) wafer defect review system for chip manufacturing at the 20nm device nodes and below.
Applied Materials, Inc. debuted its defect review scanning electron microscope (DR-SEM) Applied SEMVision G5 system to image and analyze 20nm yield-limiting defects in a production environment without manual intervention.
Reticle Labs released RS-Mini, an enterprise-class highly compact mask inspection defect management framework for mask and wafer fabrication plant infrastructure. It allows fabs to share inspection results, track defect trends, summarize inspection results from multiple systems, and more.