Cleaning Process
Cleaning Process news and technical articles from Solid State Technology Magazine. Search Cleaning Process latest and archived news and articles
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Materion expands PVD shield cleaning facility in NY
… more space with a fully automated robotic twin wire arc spray, increased precious metal refining capacity, new cleaning processes , and a Class 10,000-certified cleanroom. The site provides precision parts cleaning and surface treatment …
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SUSS wafer bonder/debonder features up to 6 modules in new generation
… configured for any major permanent bonding process, as well as mechanical debonding processes at room temperature. Cleaning processes for 3D integration and 3D packaging are also supported. Cu-Cu, polymer, fusion and hybrid bonding processes …
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FSI wins wafer clean tooling orders from FEOL and BEOL customers
… and integrated atomized spray bar. The foundry producer will use the system for back-end-of-line (BEOL) cleaning processes . Foundry and logic manufacturers are finding low-k materials and metal film stacks much more sensitive to wet …
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Suss joins imec's EUV mask integrity work
… develop an in-fab approach to EUV lithography mask integrity. The work, which builds on a collaboration in mask cleaning processes between Suss unit Hamatech APE and imec since 2009, will focus on mask cleanliness during in-fab transportation …
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SPIE BACUS: Delayed Photomask Japan 2011 in a nutshell
… durability of MoSi-based attenuated mask absorbers with different resist strip processes. It is known that mask cleaning processes , all of which use wet chemistry, can degrade the phase shift and transmission of these absorbers. Ha found …
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RBCN brings aluminum oxide processing in-house
… crystal growth, high precision core drilling, wafer slicing, surface lapping, large-diameter polishing and wafer cleaning processes . Further information is available at www.rubicon-es2.com . Subscribe to Solid State Technology
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Imec, Lam Research improve wafer drying with test method
… isolators, gate structures, and stacked capacitors can fall victim to capillary forces during the dry step of wet cleaning processes . Improved drying techniques will reduce the risk of stiction. Also read: Imec, ASML extend litho work, debut …
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RBCN upgrages to larger sapphire wafer furnaces company-wide
… growth, high precision core drilling, wafer slicing, surface lapping, large-diameter polishing and wafer cleaning processes . Further information is available at www.rubicon-es2.com . Subscribe to Solid State Technology/Advanced …
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Defect removal using dry cryogenic aerosols
… integrating a dry cryogenic aerosol cleaning process after first or second metal in-line ..... aerosol is controlled to optimize the cleaning process and balance particle removal efficiency ..... the manufacturer attributed to the cleaning process on two different lots that received …
