Chemistry
Chemistry news and technical articles from Solid State Technology Magazine. Search Chemistry latest and archived news and articles
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2013: Advanced chemistry moves center stage
By Dr. Ravi Kanjolia, Chief Technology Officer, SAFC Hitech We are in an age where chemistry is center stage in the race to advance Moore’s Law and More Than Moore. The continued drive towards smaller feature sizes …
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Process and environmental benefits of HF-ozone cleaning chemistry
… Montana overview HF-ozone cleaning chemistry can perform the same functions as a conventional ..... contamination removal. This process chemistry also reduces cycle time and requires ..... hardware. Properly configured HF-ozone chemistry saves cleanroom floor space and, because …
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Nobel prizes in physics, chemistry touch semi industry
… The 2007 Nobel Prizes for Physics and Chemistry both find direct applications close to ..... over." Meanwhile, the Nobel Prize for Chemistry goes to Gerhard Ertl, Prof. emeritus ..... his "groundbreaking studies in surface chemistry ," which Nobel claims were largely based …
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Mitsubishi, Applied Materials collaborate on wafer-cleaning chemistry
… Clara, CA) are jointly-developing AM1 chemistry for Applied Materials' new single ..... Oasis Clean system. The proprietary AM1 chemistry , when used in the Oasis system's AM ..... Materials has enabled us to fine-tune our chemistry to the exact specifications of their …
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Observations on the chemistry and physics of STI etch in Cl 2 -Ar plasmas
… shallow trench isolation. A two-gas etch chemistry is used, and the controlled redeposition ..... tool using a Cl 2 -HBr-N2-He-O 2 chemistry (Fig. 6) [1]. Conclusion Effective ..... demonstrated using a simple two-gas etch chemistry . The proposed mechanism for profile …
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Chemistry and treatment of III-V semiconductor wastewater
… require some familiarity with the aqueous chemistry of III-V elements (i.e., GaAs ..... and related water usage concerns.) Chemistry and treatment issues Treatment and removal ..... arsenic is aided by investigating the basic chemistry of typical arsenic-bearing wastewaters …
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BOC acquires Systems Chemistry
BOC acquires Systems Chemistry Murray Hill, NJ To give its semiconductor ..... the BOC Group has purchased Systems Chemistry Inc., a wholly-owned subsidiary ..... High Vacuum International. Systems Chemistry brings to the table a well-established …
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Wet chemistry processing system
Wet chemistry processing system Interlab announces wet chemistry processing systems for cleaning and etching recovered silicon. Customized systems are capable of cleaning any variety of silicon substrates from poly-silicon chunks to 300-mm …
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Fluorine plasma chemistry for high-AR dielectric etching
… stop. Data in this article show how the chemistry of two new etch molecules - C 4 F 6 and ..... enlarge image The trend in dielectric etch chemistry has been to lower the F/C ratio to enhance ..... 200mm process kit optimized etch process chemistry , and a modified Gaseous Electronics …
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Chemistry and physics of the PEB process in a CA resist
… dimensions. Figure 1. Comparison of the chemistry of DNQ-novolac (i-line) and chemically ..... without being consumed itself. The chemistry during the PEB step plays a critical ..... First, the detailed deprotection chemistry is analyzed under conditions where there …
