Chemical Vapor Deposition
Chemical Vapor Deposition news and technical articles from Solid State Technology Magazine. Search Chemical Vapor Deposition latest and archived news and articles
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Safe usage of C1F3: Supply, vacuum service, and exhaust gas management
… BOC Gases, Murray Hill, New Jersey Chlorine trifluoride (ClF3) is a highly reactive process gas used in chemical vapor deposition (CVD) and diffusion furnace applications for nonplasma cleans. Relatively new to US wafer manufacturers …
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The advanced state of MOCVD for UHB-LEDs
… multicomponent structure of ultrahigh-brightness light-emitting diodes (UHB-LED) with metal organic chemical - vapor deposition (MOCVD) requires accurate control of layer thickness to better than 1%, 1% composition uniformity over …
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High-performance SiGe pHMOS using reduced-pressure CVD
… heterostructure epitaxial process with reduced-pressure chemical vapor deposition . Along with high-speed operation and excellent ..... molecular beam epitaxy (MBE) and ultrahigh vacuum chemical vapor deposition (CVD). Reduced-pressure chemical beam deposition …
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The Precision 5000 story
… worldwide have purchased these systems for etch and chemical vapor deposition (CVD) applications. Introduced in April 1987 ..... prototype on a bench - I knew it was worth backing. Chemical vapor deposition was a good potential market application. We …
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Dielectric anti-reflective coatings for DUV lithography
… Austin, Texas High performance plasma-enhanced chemical vapor deposition (PECVD) dielectric antireflective coatings ..... 1927, SPIE, 1993. 6. T. Gocho et al., " Chemical Vapor Deposition of Antireflective Layer Film for Excimer Laser …
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Microcoating goes "mini" with CCVD
Microcoating goes "mini" with CCVD By Susan English Atlanta, GA -- Combustion chemical vapor deposition (CCVD) technology was brought to national attention recently when it was featured on CNN`s November 28 broadcast of Future Watch …
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Applied Seals North America partners with SEMATECH
… excursions that are found in vacuum process tools. As a part of this project, fab participants identified chemical vapor deposition (CVD) systems as the largest contributor to the failure rate and shallow trench isolation (STI) gap fill …
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Alchimer to collaborate with imec on advanced nano-interconnect technologies
… meet reliability specifications, and achieve high yields. Conventional physical vapor deposition (PVD) and chemical vapor deposition (CVD) processes are not meeting these requirements. Alchimer's wet deposition technologies are based on …
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A Preview of Semicon West 2013
… of its low throughput. This will mean improving what Kirsch says is the preferred process — metalorganic chemical vapor deposition (MOCVD). In addition to engineering out defects, the industry will have to fully understand ESH issues because …
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Element Six and Delft University demonstrate milestone in solid-state diamond research
… The collaboration, used two synthetic diamonds of millimeter-size that were grown by Element Six through chemical vapor deposition (CVD). The synthetic diamonds were engineered to contain a particular defect that can be manipulated using …
