Chemical Etching
Chemical Etching news and technical articles from Solid State Technology Magazine. Search Chemical Etching latest and archived news and articles
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Cleaning system
… integration with CMP polishers is now available for OnTrak Systems. Combining mechanical scrubbing and in-situ chemical etching in one system, the Synergy Integra uses a one-step cleaning approach. The unit reduces transfer time between …
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Catalytic technology for PFC emissions control
… substances known [1, 2]. Examples of these compounds include CF 4 and C 2 F 6 , which are employed during dry chemical etching and chamber cleaning operations in the manufacture of semiconductor devices. Emissions of PFCs by semiconductor …
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Eliminating micro-cracks, crystal dislocations with single-wafer surface conditioning
… backside metal adhesion. Wet chemical etching can provide a uniform, customized ..... dislocations is single-wafer wet- chemical etching , which uses a combination of ..... the silicon substrate. Wet chemical etching can provide a uniform, customized …
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New method monitors, catalyzes semiconductor etch in real time
… light also catalyzes the etching process itself ("photochemical etching"), a process already used in place of chemical etching on curved features or other shapes. It eliminates the problem of using expensive masks to pattern light through …
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Single Wafer Surface Conditioning
… dislocations is single-wafer wet- chemical etching , which uses a combination of ..... the silicon substrate. Wet chemical etching can provide a uniform, customized ..... grinding and wet etching, a set of chemical etching tests were performed. After …
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NEMS/MEMS built by heated AFM, nanolithography patterning at Georgia Tech
… crystallization temperatures, making flexible substrates (i.e., for energy harvesting ) incompatible with processing. Chemical etching produces grain sizes as large as the nanoscale features the researchers would like to produce; physical etch damages …
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Rice builds energy storage device on a single nanowire
… electrodeposition in an anodized alumina template atop a copper substrate. They widened the template's pores with a simple chemical etching technique that created a gap between the wires and the alumina, and then drop-coated PMMA to encase the wires …
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Liquid crystal polymers
… produced in LCP films using the chemical etching methods. Click here to enlarge ..... methods can become very costly. Chemical etching is a cost-effective method ..... production. To date, however, no chemical etching methods for producing via and …
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Temporary bonding/debonding for ultrathin substrates
… process include through-wafer via formation using chemical etching , laser drilling, deep trench capacitor technology ..... electroplating with the seed layer or for subtractive chemical etching of the metal layer, exposing the thinned wafer …
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Improving materials applications for solar device manufacturing
… greater flexibility to lower cost, change technology, or upgrade equipment (Table 1). Thinning and texturing Chemical etching is the most common practice in the industry for reducing thickness by bulk silicon removal and surface texturing. Etch …
