Atomic Layer Deposition
Atomic Layer Deposition news and technical articles from Solid State Technology Magazine. Search Atomic Layer Deposition latest and archived news and articles
-
Thin film researchers install Cambridge NanoTech PEALD
… install a Cambridge NanoTech Fiji plasma-enhanced atomic layer deposition (PEALD) as part of a partnership with the ALD supplier ..... www.4dlabs.ca . Cambridge NanoTech delivers Atomic Layer Deposition (ALD) systems capable of depositing ultra …
-
ALD tool applies self-assembled monolayers for MEMS/NEMS, says Cambridge NanoTech
… Monolayers (SAMs) capability in its line of Savannah atomic layer deposition (ALD) systems . SAMs coatings are inexpensive ..... Sonesta in Cambridge, MA. Cambridge NanoTech makes atomic layer deposition (ALD) systems capable of depositing ultra …
-
SEMATECH highlights from VLSI-TSA
… V, Ge and Si MOSFETs. High-field carrier mobility and MOSFET parameter characteristics were improved by atomic layer deposition (ALD) of a thin beryllium oxide layer to passivate the interface between the Si channel and high-k gate dielectric …
-
Semiconductor wafer fab equipment trends: Deposition
… roughly flat as a percentage of the overall deposition market. Gains were seen in the “other” portion, namely atomic layer deposition (ALD). ALD is used for the high- k gate dielectric in high- k /metal gate (HKMG) devices. Other as a …
-
ALD enables 3D capacitors for CEA-Leti and IPDiA
April 10, 2012 -- Research organization CEA-Leti and passive component maker IPDiA developed an atomic layer deposition (ALD) process to apply medium- k dielectric layers on a metal-insulator-metal capacitor architecture …
-
-
Copper interconnects: Process integration of iALD TaN
… Carbonitride Film Deposited with Atomic Layer Deposition Using Ammonia,” J. Electrochem ..... Grown by Plasma-Enhanced Atomic - Layer Deposition ,” J. Vac. Sci. Technol ..... George, “Tantalum Nitride Atomic Layer Deposition Using (tert-Butylimido …
-
SAFC Hitech expands LED precursor production in Taiwan
… production serving high-brightness light-emitting diode (HB-LED) manufacturers. The site will also produce atomic layer deposition (ALD) and chemical vapor deposition (CVD) precursors for silicon semiconductor fabs and offer regional transfilling …
-
Silicon nanorod project yields higher efficiency solar cells
January 3, 2012 -- Picosun Oy, Finland-based global manufacturer of state-of-the-art Atomic Layer Deposition (ALD) equipment, reports successful final results of the European Union 7th Framework Programme funded research project ROD …
-
ASM demonstrates ALD, hafnium high-k metal gate at 14nm
… 1A/cm 2 , on a customer's 14nm R&D semiconductor manufacturing line. Using ASM's most advanced Pulsar atomic layer deposition (ALD) tool, a hafnium-based material with a higher- k value than the current baseline was qualified. The …
-
Picosun ALD achieves record particle levels at Fraunhofer installation
… 70nm) per wafer -- with its PICOSUN P-300B atomic layer deposition (ALD) batch tool installed at Fraunhofer Institute ..... Also read: Picosun launches plasma enhanced atomic layer deposition source View recent issues of the MEMS Direct newsletter
