Anisotropic Etching
Anisotropic Etching news and technical articles from Solid State Technology Magazine. Search Anisotropic Etching latest and archived news and articles
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Plasma Etching/Cleaning System
… plasma etching/cleaning system. Designed for anisotropic etching of nitrides, oxides, and polyimide, the system ..... can be varied by ½ increments. In addition to anisotropic etching capabilities, another complete electrode assembly …
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Semiconductor foundry installs Mattson etch tool
… proprietary Faraday-Shielded inductively coupled plasma (ICP) source technology, along with bias capability for anisotropic etching of 300mm wafers. Mattson also offers high-throughput wafer transfer platforms for the etch step. The newest …
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MEMS developments in China
… micromachining. This technique is based on the anisotropic etching of silicon. With the proper choice of etchants ..... plasmas with both chemical and physical components. Anisotropic etching is achieved when physical reactions dominate …
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High-speed laser drilling of EWT/MWT vias for backcontact solar cells
… monocrystalline wafers – may be influenced because of anisotropic etching velocity relating to the crystal orientation ..... 155-168, 2008. 3. H. Seidel et al., “ Anisotropic Etching of Crystalline Silicon in Alkaline Solutions …
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CEA/Leti-Minatec and Alcatel to co-develop 3D interconnect processes
… thru-wafer micro vias to allow dense interconnect on both sides of chips. Considering the importance of deep anisotropic etching of silicon and via isolation to the success of the technology, CEA-Léti Minatec will accelerate development …
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Fluorine plasma chemistry for high-AR dielectric etching
… C 4 F 6 and c-C 5 F 8 - is helping to enable anisotropic etching of dielectric materials. The transition to 193nm ..... evolution of reactive ion etch chemistries for anisotropic etching of dielectric materials. Click here to enlarge image …
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On the route toward 3D-integrated all-solid-state micro-batteries
… current collector (a) covering a single crystal Si substrate (b). A large surface area can be obtained after anisotropic etching of the Si substrate, as illustrated in Fig. 1. Subsequently, the active battery layers are deposited homogeneously …
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Oxford Instruments goes 3-for-3 with ICP etching for NIL
… process is ideal for the descum application because it can be done under low-pressure conditions, which ensures anisotropic etching -- meaning that little etching is done sideways (i.e., isotropic etching is avoided), thereby avoiding …
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Featured Products
… 578-6500, www.pfeiffer-vacuum.com. Anisotropic etching system Click here to enlarge image The PE-200-RIE Convertible is suitable for anisotropic etching of nitrides, oxides, and polyimides. The system has …
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Midwest MicroDevices brings commercial MEMS services online
… applicable. In the near-term, MMD is bringing Chlorine and Boron Tri-chloride etching on-line to enable anisotropic etching of aluminum, and will also bring up a RTA capability (rapid thermal anneal). MMD is also implementing BPSG …
