Alignment Accuracy
Alignment Accuracy news and technical articles from Solid State Technology Magazine. Search Alignment Accuracy latest and archived news and articles
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Integration and 3D-ICs driving developments in wafer bonding
… major driver toward better alignment accuracy . Establishing electrical interconnects ..... bonding can achieve excellent alignment accuracy as the pre-bonding step is ..... challenging to maintain the alignment accuracy . At the IEEE 3D IC Conference …
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Ushio releases lithography tools for MEMS, power device, and LSI fab
… be customized and optimized for each MEMS device type via a flexible combination of high-performance modules. Alignment accuracy is 0.5µm or less. These modules include a newly developed lens module with a maximum depth of focus of 500µm …
