ALD
ALD news and technical articles from Solid State Technology Magazine. Search ALD latest and archived news and articles
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AVS-ALD Day 3: Precursor needs, spatial ALD , and butterfly wings
… gritty process details of various flavors of ALD and its applications, including solar cell ..... the myriad precursors that can be used in ALD . Many presenters in the solar cell sessions ..... position between traditional time-dependent ALD , where the substrate remains stationary …
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AVS-ALD , Day 2: Manufacturability takes center stage
… second day, with the focus shifting towards ALD manufacturability, and a number of sessions ..... cool." For semiconductor veterans, the ALD Conference is reminiscent of SEMICON West ..... an exciting feeling, and suggests that ALD has a very bright future ahead in a wide …
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ALD enables 3D capacitors for CEA-Leti and IPDiA
… IPDiA developed an atomic layer deposition ( ALD ) process to apply medium- k dielectric ..... capacitors . The project took less than 2 years. ALD enables conformal coating of high aspect ..... aging tests revealed stability with this ALD -based process. The PICS capacitors show …
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AVS-ALD , Day 1: Interface engineering, rabbit ears and Roy Gordon
… attendees have gathered for an in-depth look at ALD and its emergence as an enabling technology not ..... of the interface between the substrate and the ALD layer is, arguably, more important than the ALD process itself in terms of obtaining the desired …
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Picosun ALD achieves record particle levels at Fraunhofer installation
February 16, 2012 -- ALD equipment maker Picosun Oy announced record ..... PICOSUN P-300B atomic layer deposition ( ALD ) batch tool installed at Fraunhofer Institute ..... technology modules. Picosun Oy manufactures ALD systems. Learn more at www.picosun …
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ASM brings Fraunhofer into ALD and CVD process dev
… over the next 5 years, including CVD and ALD process development. Fraunhofer CNT and ..... configured for atomic layer deposition ( ALD ) and low pressure chemical vapor deposition ..... is to develop and integrate novel batch ALD processes and materials for use in CMOS …
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ALD tool applies self-assembled monolayers for MEMS/NEMS, says Cambridge NanoTech
… line of Savannah atomic layer deposition ( ALD ) systems . SAMs coatings are inexpensive ..... among SAM users. The Savannah can deposit ALD and SAM films in the same chamber, notes ..... booth at the American Vacuum Society's ALD 2011 conference this week at the Royal Sonesta …
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ALD tool from Lesker suits MEMS, nano fab
… new Atomic Layer Deposition system, the ALD 150LX, can operate as a stand-alone or ..... tailored for the specific application. The ALD 150LX features proprietary perpendicular ..... HVP precursor delivery suits multiple ALD layer deposition, including metals, oxides …
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ASM covers FinFET precursor needs from epitaxy to HKMG ALD
… gate (HKMG) atomic layer deposition ( ALD ) processes, speaking with Solid State Technology ..... will be even more critical and will drive ALD reqs, he said. The bigger transition with ..... conformality around the entire fin using ALD ," explained Hollands. "If you don …
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ASM demonstrates ALD , hafnium high-k metal gate at 14nm
December 6, 2011 -- ALD tool maker ASM International N.V. (NASDAQ ..... advanced Pulsar atomic layer deposition ( ALD ) tool, a hafnium-based material with ..... node will benefit from the combination of ALD technology in the Pulsar module with ASM …
