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Ald Deposition

Ald Deposition news and technical articles from Solid State Technology Magazine. Search Ald Deposition latest and archived news and articles

  1. AVS-ALD Day 3: Precursor needs, spatial ALD, and butterfly wings

    Article

    Thu, 30 Jun 2011

    We saw a number of situations that leveraged ALD's ability to produce films with very high mechanical strength; ALD deposition can be used to create an "exoskeleton" over less robust films, with excellent step coverage and uniformity. Other

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