Airborne Molecular Contaminants
Airborne Molecular Contaminants news and technical articles from Solid State Technology Magazine. Search Airborne Molecular Contaminants latest and archived news and articles
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Controlling AMCs in semiconductor and LCD fabs
… September 15, 2009 - Airborne molecular contaminants (AMC) pose tremendous ..... Background on AMCs Airborne molecular contaminants (AMCs) in five different ..... Influence and Measurement of Airborne Molecular Contaminants in Advanced Semiconductor …
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Purged gas purification for contamination control of DUV stepper lenses
… Saes Getters, Lainate, Milan, Italy overview The measurement and control of optical lens contamination by airborne molecular contaminants has not received much attention. To control and enhance light throughput, the universal solution is to …
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1998: The year in review
… from Staff Reports Nashua, NH -- Cleaner cleanrooms, the development of standards, and an emphasis on airborne molecular contaminants are some of the contamination control highlights of 1998. The year also saw significant developments in …
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Experts make case for AMC standards
Experts make case for AMC standards Hank Hogan Just like the weather, everyone may be worried about airborne molecular contaminants (AMCs), but no one is sure what to do about them. Different groups are either working on or have developed …
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AMCs: Properties and gaining control
… Click here to enlarge image Is there a way to monitor contamination control's newest, most deceiving foe? Airborne molecular contaminants (AMCs) are non-particulate contaminants that easily penetrate conventional HEPA and ULPA filters. Like …
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Entegris details progress on microbridging defects, lens haze
… TMS <100ppb and HMDSO <10ppb.) "Silicon-containing low molecular weight hydrocarbons are a class of airborne molecular contaminants (AMCs) that cause persistent degradation of optical surfaces in lithography equipment ." To prevent the …
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Concern grows over AMC in lithography bays
… stringent specifications for acceptable levels of airborne molecular contaminants that cause films on lenses and hazing of ..... lead to significant background levels of airborne molecular contaminants . In addition, construction materials can …
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Fabs fight the neverending war on contamination
… a return on investment in a matter of months.” The FOUPs also create problems because they can absorb airborne molecular contaminants , such as bromide from wafers, and outgas them onto other wafers. There is also the risk that wafers can …
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New Products
… enlarge image The Tiger-i™ line of analyzers provides cleanroom ambient air monitoring for gas-phase airborne molecular contaminants (AMCs) that compromise manufacturing process quality and yield. The analyzer employs patented continuous-wave …
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Questions concerning IEST-RP-CC031.2 answered
… baseline cleanroom materials and components. Different temperatures introduce different levels of outgassing airborne molecular contaminants (AMCs). The recognition that different temperatures can be used to characterize different outgassing conditions …
