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planarization slurries. Ebara Corporation supplies electroplaters, chemical mechanical polishers and pumps and abatement systems . FUJIFILM Electronic Materials supplies formulated chemicals, developers, precursors, slurries and advanced
drive the cost curve down. Cost per watt is the main driver, he notes. Edwards has a history making vacuum and abatement systems for the semiconductor industry , and is now expanding these technologies -- for example Edwards' dry pump -- to
manufacturing process (wet chemical) wet baths and rinse waters. Water reduction strategies for wet scrubbers and chemical abatement systems . Sanitary water reduction and reuse strategies. Adding to the effectiveness of these strategies is an understanding