3d Metrology
3d Metrology news and technical articles from Solid State Technology Magazine. Search 3d Metrology latest and archived news and articles
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Asian foundry inspects micro bumps with Camtek systems
… who expects that this customer will order more in the future. Camtek's AOI systems combine high performance 2D and 3D metrology and inspection on one platform. Camtek Ltd's automated tools enable inspection of semiconductors and printed circuit …
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Technologists Investigate Challenges for 3D Interconnect Metrology
… Interconnect Technology, David Marx, Tamar The half-day workshop will conclude with a panel discussion entitled " 3D Metrology – Does it Measure Up?" that focuses on the readiness of metrology tools to support 3D integration challenges. SEMATECH …
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Progress for characterization and Advanced reticle repair
… opaque defects. A relatively new 3D - metrology technology Stylus NanoProfilometry ..... nondestructively. The role of 3D metrology is critical for characterizing ..... using a probe technology for CD and 3D metrology . The concept behind SNP is elegantly …
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Veeco announces new PVD order, record automated AFM orders
… automated AFMs for metrology needs at 45nm and below. Applications for the tool include measurement of critical dimension & 3D metrology on a variety of mask materials (such as MoSi, chrome-on-glass, and resist), and for high-resolution defect …
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Japan electronics manufacturer selects FEI System for in-fab root cause analysis
… The company's products for NanoElectronics address a robust set of both fab- and lab-based applications including 3D metrology and defect analysis, mask repair and circuit edit. With R&D centers in North America and Europe, and sales and …
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PRODUCT NEWS
… States; ph 503/726-7500, www.feico.com. Hybrid confocal-atomic force microscope This new tool geared for 3D metrology applications is a combined advanced confocal/atomic force microscope (ACM/AFM) that will provide users with the …
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3D control of photomask etching using advanced CD AFM metrology
… conventional AFM probe tip has a conical or pyramidal profile terminating in a sharp point. One of the keys to successful 3D metrology with an AFM has been the development of specially shaped tips, designed for point contact profiling on both trench sides and …
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Hyphenated Systems unveils new automated NanoScale optical profiler
… said Terence Lundy, Hyphenated Systems' vice president and general manager, in a prepared statement. "Unlike other 3D metrology techniques, such as scanned laser confocal or interferometry, the HS200OP series also provides the user with a versatile …
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News Briefs
… Falcon system for inspecting wafers in the final manufacturing stages. The tool, which offers surface inspection and 3D metrology or wafers up to 300mm, is aimed at wafer-level in-line inspection processes at end-of-line, bumping, and …
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Downturn? What downturn?
… SEM, TEM, and dual beams have created the ability for customers to do things they couldn't do before in terms of 3D metrology , in terms of defect analysis, and structural metrology and analysis," explained Sarkissian. FEI's technology …
