3d Metrology
3d Metrology news and technical articles from Solid State Technology Magazine. Search 3d Metrology latest and archived news and articles
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GE-intros-CT-system-for-3D -metrology -and-analysis
… non-destructive 3D analysis and 3D metrology . Featuring fully automated CT ..... be supplied with a comprehensive 3D metrology package. This is optimized for stable ..... operator interaction. Furthermore, 3D metrology or failure analysis tasks performed …
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IITC 2009: Innovation in copper contacts, 3D , metrology
In its first foray outside of the US, IITC 2009 (June 1-3) took place in Sapporo, Japan, attended by some 600 scientists, engineers, exhibitors, and other interconnect professionals.
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IITC 2009 preview: Innovation in copper contacts, 3D , metrology
IITC 2009 program chair Mike Shapiro (IBM) and publicity chair Mike Armacost (Applied Materials) brief SST on selected papers from the more than 80 technical presentations expected at the summer conference, held for the first time in Japan.
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Hyphenated Systems and KARMA release hybrid AFM for semiconductor manufacturing
… jointly with atomic force microscope (AFM) provider KARMA Technology, Inc., and is geared for three-dimensional ( 3D ) metrology applications in semiconductor manufacturing and laboratory environments. Geared for the semiconductor industry, the …
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High-volume MEMS manufacturer adds FOGALE metrology tool
… critical dimensions (CDs) and the depth of high-aspect-ratio cavities. FOGALE also recently installed T-MAP DUAL 3D metrology at SPTS, a leader in deep reactive ion etch (DRIE) and plasma etching process tools. SPTS will use the T-MAP DUAL …
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TSV moves to "real engineering," but reliability data needed
… reliability and it would be nice to see more data. For more on the topic of metrology, SEMATECH is holding a session on 3D metrology at the Marriott Marquis, San Francisco, July 13, at noon. While Vardaman would like to hear more about reliability …
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Product News
… changeover; a camera measures the tray dimensions/tolerances and compensates for flex in the tray. Capabilities include 3D metrology inspection down to 5µm, <5min package changeover, and improved inspectability of surface defects and micro-cracks …
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Asian foundry inspects micro bumps with Camtek systems
… who expects that this customer will order more in the future. Camtek's AOI systems combine high performance 2D and 3D metrology and inspection on one platform. Camtek Ltd's automated tools enable inspection of semiconductors and printed circuit …
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KLAC packaged IC inspector ICOS CI T620
… CI-T620 system has dual tapers working sequentially with minimal operator intervention to increase units per hour. 3D metrology inspection down to 5mm and high-resolution imaging capture surface defects down to 40µm. The system boasts faster …
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Rudolph-Asia-OSAT-collab-on-2D-defect-inspection-3D -solder-bump-TSV-depth-metrology -for-stacked-die
… intermediate step toward full blown 3D ICs. “The NSX System will measure via depth, inspect for defects and provide 3D metrology of solder bumps. Rudolph is collaborating with several leading-edge companies in the assembly and test sector , and …
