More Semiconductor Metrology Articles

SENTECH will present SenSol Haze at EU PVSEC 2010

Aug 3, 2010

SenSol Haze is designed for quality control of TCO films in PV manufacturing of thin film solar cells. It offers uniformity mapping of film thickness and spectrally resolved Haze H(λ) on glass sheets.

AMAT findings on virtual metrology

Aug 2, 2010

James Moyne, Applied Materials, highlights a new technology: virtual metrology. Virtual metrology, on which Moyne presented at ASMC/SEMICON, enables tighter semi fab control using line data analysis. The summarized data is synched with real metrology data. Virtual metrology is now adaptive.

Gary Smith EDA market statistics 2010: Summary

Jul 22, 2010

The biggest change in 2009 was Mentor passing Cadence to become number two in product sales in EDA. This is an indication of the market shift caused by the move into the ESL Methodology. Synopsys remains a strong number one.

Faster scatterometry metrology: GlobalFoundries

Jul 15, 2010

Alok Vaid of GlobalFoundries, explains the technology in his paper on time-to-solution for scatterometry metrology. Scatterometry takes a long time, but Vaid proposes a new approach with more automation.

Yield metrology looking at systematic failure mechanisms: Synopsis

Jul 15, 2010

In this video from SEMICON West 2010, Sagar Kekare, Synopsis, presents ideas from his paper on rapid root cause analysis and process change validation using design-centric volume diagnostics.

SEMICON West, Day 1: CMP, slurries, metrology, thermal, zombies, observations

Jul 14, 2010

Techcet's Michael Fury reports from Day 1 of SEMICON West, from keynotes to CMP to thermal characterization, and the continued use of “zombie” semiconductor manufacturing technologies.

Lasertec joins SEMATECH 3D packaging research, installs 300mm TSV IR etch metrology tool

Jul 8, 2010

Lasertec joined SEMATECH’s 3D Interconnect program to develop robust, cost-effective process metrology technology solutions for readying high-volume via-mid through silicon via (TSV) manufacturing. This article includes a video interview with SEMATECH about the partnership.

Technical debt in semiconductor equipment: it's time to pay it down

Jul 1, 2010 This is a good time to take stock of your development readiness and how well legacy software assets will support the product roadmap. Dan O’Connor, Foliage.

EU firms combine MES, yield products for PV yield management

Apr 28, 2010

Two European firms have partnered to combine manufacturing execution system (MES) software with optical measurement technology into an offering promising "total yield management" for solar PV production.

Increasing cell efficiency and optimizing productivity using wide-area metrology

Mar 1, 2010

Good engineering practices and intelligent process optimization are keys to cost-reduction, product differentiation and brand recognition ...

Towards grid parity: advances in c-Si PV manufacturing technology

Mar 1, 2010

Lower cost c-Si panels support a key goal for solar known as grid parity, where it costs the same to generate power on rooftops as it does to buy it from the grid

Grid Parity: On Track to Reducing Cost/Watt

Mar 1, 2010

Two factors are influencing the use of photovoltaic-driven solar power today.

Products

Mar 1, 2010

The Insight M series in-line process control/optimization tool is specifically designed for thin-film solar cell manufacturing ...

SPIE Preview: EUV vs. optical battle, "alternatives" get attention

Feb 22, 2010 The SPIE Advanced Lithography Conference is where experts come to tell their advances in lithography, resists, metrology and design, and this week it appears to be heating up as a battle between optical and surging EUV, with other litho technologies offering a "sanity check," writes Gri...

EuroPIC: European manufacturing consortium for photonic integrated circuits

Jan 28, 2010 The EuroPIC project aims to facilitate access by small companies to cost-effective photonic integrated circuit (PIC) manufacture in Europe. It also will encourage research on manufacturing methods to develop an open-access industrial generic foundry production capability for Europe. EuroPIC is a ...

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