More Lithography Articles

North American semiconductor tool makers see higher bookings in April

May 23, 2012

North America-based manufacturers of semiconductor fab equipment posted $1.60 billion in orders and $1.45 billion in billings in April 2012 for a book-to-bill ratio of 1.10, according to SEMI.

IRSC brings NanoProfessor nano-science education to southeastern US

May 22, 2012

Indian River State College in FL will be the first college in the southeastern US to offer students access to the instrumentation and curriculum provided by the NanoProfessor Nanoscience Education Program from NanoInk.

EUV lithography readiness: ConFab presentation preview

May 21, 2012

Stefan Wurm, director of lithography, SEMATECH will present “EUV Lithography Manufacturing Introduction: Infrastructure Readiness” in the session Technology Trends in Semiconductor Manufacturing at The ConFab 2012, June 3-6 in Las Vegas.

Reducing mask write-time -- which strategy is best?

May 17, 2012

A number of techniques have been developed to control mask write time by reducing shot count. This article describes  and compares several techniques, and merits versus cost of each. Steffen Schulze and Tim Lin, Mentor Graphics, Wilsonville, OR

Gigaphoton opens Korean subsidiary for DUV, EUV lithography support

May 16, 2012

Gigaphoton Inc., lithography light source manufacturer, began operations at its wholly owned subsidiary, Gigaphoton Korea Inc. Gigaphoton points to Korea as “one of the most important regions in the global semiconductor industry.”

Semiconductor-grade flow sensor measures photoresist, solvent supply

May 14, 2012

SENSIRION introduced the SLQ-QT105 semiconductor-grade flow sensor for flow rates below 2cc/sec (120ml/min) of hydrocarbon-based liquids, such as photoresists and solvents.

Nanostructured polymer lithography platform established by CEA-Leti and Arkema

May 11, 2012

Arkema and CEA-Leti, with the help of Professor Hadziioannou’s team of LCPO, have successfully patterned a 20nm pitch and reduced the diameter of contacts down to 7nm with nanostructured polymers.

President Obama speaks at Albany Nano-Tech Complex today

May 8, 2012

President Barack Obama toured the SUNY - Albany Nano-Tech Complex today, speaking about the economy and education in the CNSE NanoFab Extension Building.

Lithography challenges for leading edge 3D packaging applications

May 7, 2012

The lithography challenges  associated with TSV fabrication for various devices structures are investigated. Warren W. Flack, Manish Ranjan, Gareth Kenyon, Robert Hsieh, Ultratech, Inc., San Jose, CA. John Slabbekoorn, Andy Miller, imec, Leuven, Belgium

Organic complementary logic aim of 2 European research projects

May 4, 2012

The Heterogeneous Technology Alliance in Europe is focusing on high-performance organic electronic circuits through 2 projects: COSMIC to develop p- and n-type OTFTs for complementary logic, and POLARIC for shrinking critical dimensions of OTFTs.

Ion beam optimization to reduce EUV mask blank defects

May 4, 2012

A likely cause of many of the defects seen on EUV mask blanks is the ion beam missing the target of the mask blank deposition system. This analysis provides a possible solution. Patrick Kearney and Frank Goodwin, SEMATECH, Albany, NY

CEA-Leti unveils wide-reaching silicon research scope

May 2, 2012

CEA-Leti has introduced the “LETI-3S” concept, for “Silicon Specialty Solutions.” The research is oriented to start-ups, component integrators, fabless or fablite chip companies, and equipment/consumable suppliers.

Become the Best of West at SEMICON West

May 1, 2012

Solid State Technology and SEMI will present the 2012 Best of West product awards at SEMICON West 2012, July 10-12 in San Francisco. Best of West recognizes important product and technology developments in the microelectronics industries.

Arkema enters microelectronics manufacturing research area with CEA

May 1, 2012

CEA will extend its collaboration with Arkema beyond photovoltaics into microelectronics and organic electronics, setting up two joint public-private research projects in CEA-Leti and CEA-Liten.

A fresh perspective on 450mm

May 1, 2012

I recently had the good fortune to moderate the SEMI Northeast Forum on 450mm in Albany.

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