LITHOGRAPHY

Optical, DUV, EUV, e-beam and related litho methods, mask making.

LITHOGRAPHY ARTICLES

2011 ITRS: DRAM, 3D Flash, MEMS, nano scaling steal the show

02/08/2012 The 2011 International Technology Roadmap for Semiconductors (ITRS) has been publicly released. Several areas of advancement are highlighted in the...

Semiconductors to use most ultrapure water in 2012

02/07/2012 The electronics industry will edge out coal-fired boilers as the biggest purchaser of ultrapure water systems and consumables in 2012, according to...

EVG LED mask aligner offers COO improvement in gen-2

02/07/2012 EVG uncrated the EVG620HBL Gen II fully automated mask alignment system for volume LED manufacturing. The second generation tool offers 55% higher ...

Silicon wafer revenues increased, shipments tapered in 2011

02/07/2012 Worldwide silicon wafer revenues improved 2% YOY, shows the SEMI Silicon Manufacturers Group. Worldwide silicon wafer area shipments, however, decr...

SEMICONDUCTOR INDUSTRY NEWS

Compound semiconductor makers focus on growing high-frequency market

Feb 8, 2012 Handset products dominate compound semiconductor revenue, but microelectronics companies focus development on high-performance, high-frequency applications where volumes are lower and products are ...
2011 semiconductor revenues, SIA.

UPDATED: Record semiconductor sales in 2011, 2012 outlook

Feb 8, 2012 The SIA shows 2011 worldwide semiconductor sales hit $299.5 billion, a 0.4% year-on-year increase and new record. Semico Research's forecast for 2012 shows a 10.11% growth in semiconductors revenue...

JPSA expands Ultrafast laser machining technology

Feb 8, 2012

JP Sercel Associates, Inc. (JPSA) expanded its Ultrafast processing capabilities, using Pico-second lasers with innovative laser beam delivery techniques.

Novellus' VECTOR Strata dielectric deposition tool for high-volume manufacturing of vertically integrated memory (VIM) Flash devices

Novellus film deposition tool suits 3D Flash device fab

Feb 7, 2012 Novellus debuted the VECTOR Strata dielectric deposition tool for high-volume VIM Flash manufacturing. VECTOR Strata aims for ultra-smooth films with exceptional defect performance, enabling in-sit...

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SEMICONDUCTORS WHITE PAPERS

Preventing the Destructive Potential of Partial Discharge on HV Optic Devices

The Partial Discharge phenomenon has been plaguing the electrical and electronic industries for many years, by damaging equipment and increasing production c...
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Cooling Thin Consumer Electronic Devices

Today’s modern electronic devices are more dense and capable than ever before. Cooling these devices is important not only for the reliability and stab...

SEMICONDUCTORS WEBCASTS

FREE WEBCAST: Lens Tilt in Small Auto-Focus Cameras

This webinar will provide an introduction to miniature auto-focus camera technology and voice coil motors.

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