Full-service MEMS maker Tronics has had China on its roadmap for about 10 years, the company says. In that time, China has moved from a nascent MEMS market to a location where Tronics works for several Chinese customers, especially in gyroscope products.

sp3 Diamond Technologies Inc. shipped its Model 655D series hot-filament CVD diamond reactor system to the University of California, Berkeley Marvell Nanofabrication Laboratory.

InvenSense Inc. (NYSE:INVN) says STMicroelectronics (ST, NYSE:STM) filed a complaint in the Northern District of California, alleging that InvenSense infringes 9 of ST’s patents. InvenSense contests these claims.

SEMICON West is less than 2 months away, July 10-12 in San Francisco, CA. Plan your attendee schedule now with highlights from the Extreme Electronics “show within a show;” 4 strong keynotes; sessions on device architecture and node shrink, lithography, 450mm wafers and more.

Knowles, micro acoustics and MEMS microphone maker, has shipped over 3 billion SiSonic MEMS microphones from the SiSonic MEMS microphone introduction in 2003.

“From 2011 to 2017, the number of DRIE-processed wafers will jump from 5.4M to more than 27M (all wafer sizes). This is >30% CAGR”, explains Dr Eric Mounier, Yole Développement.

MEMS Industry Group (MIG) inducted 3 members into its MIG Hall of Fame, from EV Group (EVG), Acuity Inc. and Analog Devices Inc. (ADI).

TechNavio predicts 22% CAGR for MEMS microphones from 2011 to 2015, mainly due to the shrinking form factor of these devices. MEMS microphones are gaining acceptance in a new field: healthcare electronics.

Integrated Device Technology, Inc. (IDT), introduced a piezoelectric MEMS resonator technology that does not use crystals. IDT has branded the components CrystalFree pMEMS (piezoelectric MEMS).

MEPTEC will host its 10th Annual MEMS Technology Symposium in San Jose, CA. Keynotes cover “sensory swarms” and motion interfaces, and sessions will cover MEMS roadmaps; design, manufacturing, and test of MEMS; MEMS architectures and uses, and more.

To resolve "stiction" yield failure issue in the manufacturing of MEMS devices, special release processes have been developed based on a combination of structural and sacrificial materials. Yin Xu, Vlad Tarasov, Wei Chen, And Koukou Suu, ULVAC Technologies, Inc., Methuen, MA

SEMI presented US Congressman Dave Camp (R-MI) with its 2012 North American Government Leadership Award for his leadership and support of the US microelectronics and photovoltaic manufacturing value chain.

The top 3 MEMS manufacturers by revenue -- Texas Instruments, Hewlett Packard, and Bosch -- fought for market share in 2011, but #4, STMicroelectronics, experienced the biggest revenue jump year-to-year.

Si-Ware Systems (SWS) launched its Inertial Sensor Development Platform, the SWS61111, a tool that can be used to evaluate an inertial sensor, such as a gyroscope or accelerometer, to understand sensor behavior and performance with complete interface electronics.

Baolab Microsystems will modify the structures of its 3D NanoCompass to build a range of other motion sensors, with the end-goal of low-cost, smart, reconfigurable inertial measurement units (IMUs).

memsstar Limited, deposition and etch equipment supplier to the MEMS and semiconductor industries, named Mike Thompson as CEO.

Boston Micromachines Corporation won a Phase II contract for $750,000 from NASA's SBIR to support its Exoplanet Exploration program. Phase II covers reliability in the harsh environment of space.

Western Michigan University developed a device combining a laser and diamond cutting system, enabling users to process hard, brittle materials that are difficult to machine. Initial applications include MEMS manufacturing, and other fabrication on semiconductor materials.

Hanking Industrial Group Co., Ltd., broke ground on a micro electro mechanical system (MEMS) manufacturing campus in Fushun City, China, outside of Shenyang.