MEMS

Manufacturing and packaging technologies for micro electro mechanical systems (MEMS).

MEMS NEWS & FEATURES

Implantable MEMS sensor gets jiggy with self-powering design

01/27/2012 Straight outta Purdue University, a miniaturized implantable medical micro electro mechanical (MEMS) pressure sensor chip can be recharged with the...

imec engineers bio-compatible silicon photonics sensors

01/27/2012 Genalyte developed and produced a set of disposable silicon photonics biosensor chips with research body imec, for use in its diagnostic and molecu...

Nanomechanical loudspeaker could detect faint electrical signals

01/26/2012 The JQI, the Neils Bohr Institute in Copenhagen, and Harvard University researchers developed a theoretical method for detecting weak electrical si...

Heidelberg direct-write lithography system suits MEMS prototyping

01/25/2012 Heidelberg Instruments launched the µPG 501 table-top direct-write lithography system for prototyping MEMS, integrated optics, microfluidic/lab-on-...

SCHOTT launches MEMS-wafer borosilicate glass as thin as 0.1mm

01/25/2012 SCHOTT North America Inc. introduced MEMpax borosilicate glass for use in MEMS manufacturing, available in thicknesses from 1.1 to 0.1mm and with a...

LIVE NEWS STREAM

GenAudio Unveils AstoundSound for CE

Jan 26, 2012 GenAudio has launched AstoundSound for CE (consumer electronics) allowing integration of stereo and multi-channel input spatialized audio playback ...

Ultra Miniature Accelerometer operates reliably up to +350[degrees]F; Ultra Miniature High Temperature Accelerometer, Model 3224C

Jan 26, 2012 Model 3224C low-profile (0.105 in.) charge mode accelerometer weighs 0.2 g and incorporates ceramic shear sensing element in laser-welded titanium ...

A Novel Silicon-based Wideband RF Nano Switch Matrix Cell and the Fabrication of RF Nano Switch Structures

Jan 26, 2012 FULL TEXTAbstract: This paper presents the concept of RF nano switch matrix cell and the fabrication of RF nano switch. The nano switch matrix ce...