September 19, 2012 - X-Fab Silicon Foundries has debuted an open-platform MEMS 3D inertial sensor process, the first to be made available directly from a high-volume pure-play foundry, it claims. The new technology is suitable for a wide range of applications that use 3D accelerometers or gyroscopes: mobile devices, consumer goods, games and toys, automotive, robotics, and industrial and medical equipment.
The new technology features robust, single-crystal silicon for inertial masses and drive-combs, proprietary buried contact technology that supports complex metal interconnects using a single metal layer, low parasitic capacitance, and EMI protection. It was developed using X-FAB’s step-by-step qualification procedures to ensure the process is characterized, stable, and high-yielding. One- and 2-axis designs can be produced with the same process, and accelerometer and gyroscope designs can be placed side-by-side on a single chip enabling manufacture of "six degrees of freedom" (6DoF) inertial measurement units (IMU).
- MEMS processing unit completed at X-FAB silicon foundry in Germany HQ
- X-FAB to manufacture MEMS energy harvesters for MicroGen Systems
"X-FAB's open-platform processes launch a new era for the MEMS industry," proclaimed Iain Rutherford, X-FAB’s MEMS business line manager. "We are shifting the paradigm from the limiting 'one product, one process' rule to the open platform approach of giving any company access to a world-class quality process that can be used for multiple applications. It enables our customers to realize their goals in record time."
Visit the MEMS Channel of Solid State Technology, and subscribe to our MEMS Direct e-newsletter!