Table of Contents

Solid State Technology

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  • Features

    • Fab Management

      • Strategies for energy reduction in semiconductor manufacturing
        ISMI’s Environment Safety Health (ESH) Program has undertaken specific projects to demonstrate efficiency and conserve energy in semiconductor manufacturing operations.
      • Realizing the 450mm transition
        The International SEMATECH Manufacturing Initiative (ISMI) is actively involved in building the foundational infrastructure and coordination of activities to enable a 2012 pilot line target date at the direction of its members.
      • A vision for a next-generation 300mm factory
        To help meet next-generation factory (NGF) challenges, ISMI has been tasked by its member companies to explore ways in which improvement in cycle time and cost reductions can achieve targets of 50% and 30%, respectively, by 2012.
    • Software

      • EDA interface value proposition
        Cycle-time improvements and time-waste reduction are being accomplished by improving equipment setup times and operations.
    • Metrology

    • Redefining semiconductor industry R&D
      In 1987, Morris Chang, President of Taiwan’s Industrial Technology Research Institute (ITRI) and a 25-year veteran of Texas Instruments, recognized an opportunity to redefine semiconductor manufacturing.
    • Automation

  • Departments

    • Product News

      • Product News
        These two tools for wafer edge (E30) and backside inspection (B30) provide improved sensitivity and high throughput for inspection and in-line monitoring of 32nm FEOL and BEOL manufacturing processes.
      • Defect-inspection tool for monitor wafers
        The SurfScan SP2XP monitor-wafer defect inspection system incorporates upgrades from the original edge-handling version SurfScan SP2XP, including improved sensitivity to defects on silicon/poly/metal films and enhanced ability to sort defects by type and size.
    • World News

      • DRAM, NAND woes seen spilling into 2009
        Despite a mild recovery in 2Q08, global DRAM makers are once again building inventories and pulling the rug out from prices, and the buildup will likely push out a full market recovery until the end of next year, according to a new warning by iSuppli.
    • Tech News

      • MoSi-ing along to 32nm
        The chrome material that has blocked the light on binary masks for a generation may finally have outlived its usefulness, according to Franklin Kalk, CTO of Toppan Photomasks, in an exclusive interview with SST.
    • Editorial

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LATEST ISSUE

05/01/2013
Volume 56, Issue 3

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