Departments
- Editorial
  - MEMS moves to the mainstream
    The MEMS market has long been in a state of extreme fragmentation. Even now, according to a new report from France-based market research and consulting firm Yole Développement, MEMS devices are actively being produced by some 300 companies, 250 of which sell less than $20 million worth of products annually.
- World News
  - World News
    Worldwide silicon area wafer shipments rose another 4% in 2Q06 vs. the prior quarter to nearly 2000 million sq. inches (MSI), more proof that wafer suppliers are enjoying robust sales and heavy demand.
- Tech News
  - SEMATECH optimizes the gate stack with dual high-k and metal gate
    At the Symposium on VLSI Technology in June, SEMATECH reported on a new approach it has developed to meet ITRS requirements for low-standby power (LSTP) transistors for the 45nm technology generation.
  - Giving life to self-healing chips: preventing hard silicon failures
    In a bid to enhance the performance of microprocessors, the Semiconductor Research Corp. (SRC) recently said it has a plan to develop self-healing chips-i.e., chips that don’t fail, having been designed to diagnose when components wear out and heal themselves on the fly.
  - "Jumpy" chromophores could enable molecular electronics
    Researchers at the U. of Pennsylvania and St. Josephs U. are touting their work on chromophores, which when linked together enable transfer of electrical charges that exceed mobility in organic semiconductors by up to a factor of three, and hold promise for applications in displays and solar cells.
- Vacuum Technology
  - Vacuum systems for ALD
    Atomic layer deposition (ALD) processes require vacuum conditions both for proper deposition and adequate purging of precursors from the chamber.
- Product News
  - Product News
    The IX-250 excimer laser micromachining system is a Class 1 industrial-grade workstation that can accommodate a variety of excimer lasers, offering 12 axes of motion, with 250mm×200mm travel (for processing 150mm wafers).
- Industry Forum
  - Manufacturing challenges for immersion below 45nm
    With the introduction of the immersion technique into deep-submicron patterning, the semiconductor industry will manage to keep up with the scaling roadmap using refraction-based lithography for another two, hopefully three generations before switching to the most likely successor, extreme ultraviolet (EUV) lithography.
Features
- Cover Article
  - Using oxygen and hydroxyl radicals for batch-furnace oxidation
    Balancing the lifetime and residence time of radicals is critical to achieving acceptable radical oxidation growth rates and uniformities in large-batch reactors.
- Implantation
  - Meeting future SDE requirements using co-implantation and RTA
    The requirements for the source/drain extensions of future devices are increasingly more demanding with respect to dopant activation, junction depth, and abruptness as semiconductor technology continues to scale [1].
- Resists
  - Controlling CD and process window limits for implant patterning
    As design rules have shrunk, the overlay of implant layers has become a problem [1].
- Photomasks
  - A process window-based approach to mask optimization
    Different performance and wafer-yield criteria apply to different types of integrated circuits, and the masks for those circuits may need to be optimized to achieve maximum value of production.

EDITORS' PICKS

LIVE NEWS FEED

ON SEMICONDUCTOR REPORTS DISPOSITION BY SENIOR VP RASHID (Arizona)

VITESSE SEMICONDUCTOR REPORTS ACQUISITION BY DIRECTOR TRAUB (California)

VITESSE SEMICONDUCTOR REPORTS ACQUISITION BY DIRECTOR FREY (California)

Editorial: Grins and Grimaces

Diodes Buys BCD Semiconductor Manufacturing

SEMICONDUCTOR ARTICLES

MRAM: Disruptive technology for storage applications

Digi-Key Corporation and MEMSIC announce global distribution agreement

STMicroelectronics proximity sensor solves smartphone hang-ups

Nanoelectronics Conference will focus on semiconductor industry’s future

MORE SEMICONDUCTORS

PACKAGING ARTICLES

MRAM: Disruptive technology for storage applications

STMicroelectronics proximity sensor solves smartphone hang-ups

Broadcom tops three ABI Research wireless connectivity IC competitive assessments

Strategic approach to R&D is goal at National Photonics Initiative Event

MORE PACKAGING

MEMS ARTICLES

Digi-Key Corporation and MEMSIC announce global distribution agreement

STMicroelectronics proximity sensor solves smartphone hang-ups

Nanoelectronics Conference will focus on semiconductor industry’s future

Short-range wireless technology IC market to reach almost 5 billion units shipped in 2013

MORE MEMS

LEDS ARTICLES

Student develops brighter, smarter and more efficient LEDs

AIXTRON sees signs of market stabilization in report of 2012 fiscal year

EPIC to develop industry database and interactive map

Fab Spending Forecast: Equipment spending is expected to remain flat in 2013

MORE LEDS

DISPLAY ARTICLES

EPIC to develop industry database and interactive map

ITO film market undergoing a sea of changes

Corning believes flexible displays with Willow glass are still three years out

Worldwide LED component market grows 9%

MORE DISPLAYS

Topics

LEDS

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VIDEOS

TECHNOLOGY PAPERS

Automated Test Creation for Mixed Signal IP using IJTAG

The creation of test patterns for mixed signal IP has been, to a large extent, a manual effort. To improve the process used to test, access, and control embe...

Faster Time to Root Cause with Diagnosis-Driven Yield Analysis

This whitepaper describes the benefits of implementing a diagnosis-driven yield analysis flow using the Tessent® Diagnosis and Tessent YieldInsight® software...

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WEBCASTS

Innovation in Semiconductor Manufacturing Instrumentation

As the semiconductor industry moves toward smaller geometries, manufacturing processes are becoming more complex. In particular, they’re more deman...

3D and 2.5D Integration: A Status Report Live Event

This webcast will explore the present status of 2.5 and 3D integration, including TSV formation.

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Issue 10

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Solid State Technology

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World News

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Vacuum Technology

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Implantation

Resists

Photomasks

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