Optical wafer and die inspection system
Post probe/2nd optical inspection is currently performed manually at microscope-based review stations, where operators make a pass/fail decision that can be slow and inconsistent. The NSX-80 inspection tool performs automated post probe/2nd optical wafer and die inspection, giving fast, accurate results. Automated inspection can lead to higher yields through automated data collection and reporting, wafer mapping and identification, and complete integration with the automated manufacturing process. August Technology, Edina, MN; ph 612/820-0080, fax 612/820-0060, e-mail Claus.Nielsen@AugustTech.com.