MEGA Systems & Chemicals Inc., Chandler, AZ, a maker of chemical blending and distribution systems, won the Valued Strategic Partner Award from Harris Semiconductor. MEGA supplied to Harris` 200-mm facilities in Mountaintop, PA, chemical distribution/dispense systems, which provide distribution for optimum particle removal during the wafer manufacturing process. Among the installed systems were the MEGApure 100,100SS, and 500SF systems that provide single-pass filtration. The MEGApure 500SF features 0.1-?m recirculation filtration on the drumside with stabilized filtration on the dispense daytank/channel.
Print
Email
Save
