STT-MRAM scale up boosts magnetic metrology orders at MicroSense

MicroSense Polar Kerr magnetic metrology system for 300mm semiconductor wafers.

June 21, 2012 - PRNewswire -- Metrology system supplier MicroSense LLC reports an increase in orders for its magnetoresistive random access memory (MRAM) magnetic metrology systems. The metrology tools characterize the magnetic properties of multi-layer wafers used in the development and manufacturing of perpendicular MRAM.

MicroSense offers a new 300mm Polar Kerr (out-of-plane) MRAM metrology system, the KerrMapper (in-plane) tool and Vibrating Sample Magnetometers (VSM) for MRAM makers. The 300mm full-wafer non-contact magnetic metrology systems can be used for process control on perpendicular and in-plane MRAM.

Also read: Micron begins STT-MRAM dev partnership at A*STAR

While MicroSense shipped a number of gen-1 MRAM metrology tools since 2004, the MRAM industry did not scale up to high volumes until the development of  spin transfer torque MRAM (STT-MRAM), said Tom McNabb, president and COO of MicroSense. STT-MRAM’s ascent has resulted in a number of new MRAM tool orders for MicroSense, he said.

MicroSense is a leading manufacturer of magnetic metrology tools and Vibrating Sample Magnetometers (VSM), which are utilized in high-resolution metrology applications, such as hard disk drive disks & read/write head wafers, semiconductor wafers, and fundamental magnetic material characterization. MicroSense just acquired SigmaTech in June 2012. Learn more at www.microsense.net.

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