April 24, 2012 -- Inpria, chemical materials supplier for thin-film deposition, joined the consortium SEMATECH’s Resist Materials and Development Center (RMDC) in its Lithography Program. Inpria and SEMATECH will tackle on critical issues for resist in extreme ultraviolet (EUV) lithography. The partnership will rely on SEMATECH’s hardware and research expertise and semiconductor experience, and Inpria’s advanced semiconductor patterning materials and processes.
The RMDC is hosted at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany.
Inpria’s inorganic resists have resolved 11nm line/space features and exhibit high etch resistance. Inpria and SEMATECH will extend resists to qualify the 0.5 NA EUV imaging optics, which support resist research for 11nm half-pitch (hp) and smaller nodes in the RMDC facilities. Inpria will also work to increase the photosensitivity of its resist materials, meeting productivity requirements for future semiconductor manufacturing applications.
This partnership will “rapidly increase the rate of development” for Inpria’s EUV lithography materials, said Andrew Grenville, CEO of Inpria. It will also “help strengthen the RMDC’s ability to address critical resist issues in advanced materials,” said Stefan Wurm, director of Lithography, SEMATECH.
SEMATECH’s RMDC will provide access to 2 micro-exposure tools (METs) as well as several metrology tools located at the College of Nanoscale Science and Engineering of the University at Albany and the University of California, Berkeley. At the RMDC, leading resist and materials suppliers participate in focused, cooperative R&D with SEMATECH member companies. Together, the RMDC provides the hardware and research expertise required by materials suppliers and member companies to develop EUV resist processes that meet the stringent resolution, linewidth roughness, and sensitivity specifications needed for EUV insertion at member companies.
SEMATECH is an international consortium of leading semiconductor device, equipment, and materials manufacturers. Learn more at this year celebrates 25 years of excellence in accelerating the commercialization of technology innovations into manufacturing solutions. Through our unwavering commitment to foster collaboration across the nanoelectronics industry, we help our members and partners address critical industry transitions, drive technical consensus, pull research into the industry mainstream, improve manufacturing productivity, and reduce risk and time to market. Information about SEMATECH can be found at www.sematech.org..
Inpria designs and synthesizes solution precursors for the deposition of high-performance inorganic thin films, addressing critical needs in device fabrication and patterning across multiple industries. Information about Inpria Corporation can be found at www.inpria.com.