IEDM 2011: Hynix pushes NAND limits

11/28/2011

By James Montgomery
News Editor

The beat goes on for NAND flash, as Hynix shows in an IEDM paper a "middle-1Xnm" NAND flash memory cell. Several issues had to be addressed: how to pattern the device (solution: quad-spacer patterning with ArF immersion), CG poly filling/interference (solution: FG slimming), and charge loss/UV Vt decrease (solution: airgap and N&plusmn1 WL bias control). [Paper #9.1: A Middle-1X nm NAND Flash Memory Cell (M1X-NAND) with Highly Manufacturable Integration Technologies"]

Next slide: FinFETs for sub-20nm SoCs
Previous slide: Graphene devices in a 200mm fab

Font Sizes:

POST A COMMENT

Easily post a comment below using your Linkedin, Twitter, Google or Facebook account. Comments won't automatically be posted to your social media accounts unless you select to share.

EDITORS' PICKS

Econometric Forecast: Semiconductor growth should recover by 2014

Analyst: Chip inventory at semiconductor suppliers reaches worrisome high

IDC: Semiconductor revenues will grow 4.9% in 2013

2013: An economic outlook for the global IC market

IEDM keynote: It tastes like chicken

Horizontal channels key to ultra-small 3D NAND

Molybdenum sulfide: the new graphene?

TOP BLOG POSTS

Intel Foundries MEMS for Fuel Cell Start-up Nectar

IFTLE 134 SEMI 3D European Summit – Is the Wide IO Driver Dead?

EUV source roadmaps: Physics vs Engineering

Intel details 22nm trigate SoC process at IEDM

IFTLE 128: RTI 3D ASIP Part 1; Lester the Lightbulb update

Questions and answers on FD-SOI

GlobalFoundries takes on Intel with 14nm finFET “eXtreme Mobility” process

LIVE NEWS FEED

-ON Semiconductor Wins '2012 Best Partner' Award from ASUS

Actions Semiconductor Posts First Quarter Results

FRIGHTENING GREASE; Scandal of filthy chip shop with motorbike next to the chip fryer

PEREGRINE SEMICONDUCTOR REPORTS DISPOSITION BY VP MOBILE WIRELESS SOLUTIONS KELLY (California)

-Blue Coat Acquires Netronome's SSL Inspector Appliances

RECENT ARTICLES

New magnetic graphene may revolutionize electronics

Perfectly doped quantum dots yield colors to dye for

Intel VP to discuss low-cost computing initiative in IHS/SID 2013

North American Semiconductor Industry: Continuing with high levels of investments

Top industrial electronics semiconductor suppliers suffer declining revenue in 2012

A new way to discover and monitor defects

SEMICONDUCTOR ARTICLES

New magnetic graphene may revolutionize electronics

Perfectly doped quantum dots yield colors to dye for

North American Semiconductor Industry: Continuing with high levels of investments

Top industrial electronics semiconductor suppliers suffer declining revenue in 2012

MORE SEMICONDUCTORS

PACKAGING ARTICLES

Top industrial electronics semiconductor suppliers suffer declining revenue in 2012

Despite overall power electronics 2012 downturn, SiC kept on growing

SSDs to account for one-third of worldwide PC storage shipments by 2017

Intel launches low-power, high-performance microarchitecture

MORE PACKAGING

MEMS ARTICLES

New magnetic graphene may revolutionize electronics

A new way to discover and monitor defects

First quarter 2013 reports slight decrease in silicon wafer shipments

Second phase of Nanoelectronics Research Initiative to focus on post-CMOS electronics

MORE MEMS

LEDS ARTICLES

Perfectly doped quantum dots yield colors to dye for

First quarter 2013 reports slight decrease in silicon wafer shipments

LED ingot market to reach $325M by 2015

IEDM announces 2013 call for papers

MORE LEDS

DISPLAY ARTICLES

Perfectly doped quantum dots yield colors to dye for

Intel VP to discuss low-cost computing initiative in IHS/SID 2013

IHS discusses how PCs can survive the tablet invasion

IEDM announces 2013 call for papers

MORE DISPLAYS

Topics

View Solid State Technology articles by topic, A-Z

VIDEOS

NEW PRODUCTS

	Spectra-Physics introduces industrial picosecond laser May 10, 2013 Spectra-Physics, a Newport Corporation brand, introduces Spirit ps 1040-10, an industrial-grade picosecond laser for precision ...
	Multitest announces ecoAmp for high-power applications May 8, 2013 Multitest announces that its ecoAmp high power Kelvin contactor successfully passed a challenging evaluation for an automotive ...
	EV Group rolls out EVG120 processing system May 7, 2013 EV Group (EVG), a supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, t...
	Quartz Imaging introduces automated measurement for semiconductor images April 30, 2013 It can be very time-consuming for engineers to measure the various features of an X-SEM image of a semiconductor device.

TECHNOLOGY PAPERS

Rapid Defect Indentification with Layout-Aware Diagnosis

Scan logic diagnosis is a powerful tool to help failure analysis engineers determine the root cause of a failing die. Yield engineers, on the other hand, are...

Flip Chip Devices get Flat and Happy

Thin is definitely in, but what our modern flip chip devices really want is to be flat and happy! As flip chip die have become increasingly thinner in recent...

More Technology Papers

WEBCASTS

Surface Cleaning and Preparation

This introduction requires the development of new critical and selective cleans tackling galvanic corrosion, pattern collapse both in FEOL and BEOL...

450mm Status Report

Hear from the G450C General Manager, Paul Farrar Jr., on the current status of activities, key milestones and schedules, and imec’s senior business...

More Webcasts

BUYERS GUIDE

Semiconductors

Packaging

MEMS

SUBSCRIBE

Article Archive for Solid State Technology.

FREE eNewsletters

I would like to receive eNewsletters on the following topics:

*

First Name

*

Last Name

*

Email Address

*

Country

* Required

Electronics Manufacturing News & Products

.

Advanced Packaging

.

Displays Manufacturing

.

LED Manufacturing

.

MEMS Manufacturing

.

Semiconductor Manufacturing

.

Please fill in the required fields above.

© 2013. PennWell Corporation. All Rights Reserved. PRIVACY POLICY | TERMS AND CONDITIONS

Please fill out the remaining fields to complete your registration.

First Name Last Name

Email

Job Title

Company

Country

By clicking 'Register' you are indicating that you have read and agree with our Terms & Conditions and Privacy Policy.

or

Or, login with your PennWell account:

or

Or, register with us using the form below:

First Name Last Name

Email

Password

Job Title

Company

Country

By clicking 'Register' you are indicating that you have read and agree with our Terms & Conditions and Privacy Policy.

Enter your email address below and click Submit to receive password reset instructions via email.

An email has been sent to .

Please follow the instructions in the email to change your password.

Your account has been created and you are now logged in.

It looks like you've already registered with . Please login below to link your accounts.

Thank you for registering. An email has been sent to with instructions on how to verify your account.

The specified email address, , needs to be verified in order to login.

An email has been sent to with instructions on how to verify your account.

/content/eiq-2/en/articles/sst/2011/11/iedm-2011-hynix-pushes-nand-limits.resendverification.html