SPIE keynote Imec installs ASML pre-production EUV scanner

At the SPIE Advanced Lithography conference, Luc Van den hove, president and CEO of imec, announced during his keynote speech that imec has started the installation of ASML's pre-production extreme ultraviolet lithography (EUVL) scanner, the NXE:3100, in its Leuven, Belgium facility.

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