Report from the VLSI Symposium: Planar CMOS to 22nm, but no more
Overall agreement at this year's VLSI Symposium (June 16-19, Waikiki, Hawaii) was that planar CMOS is extendable to 22nm node but unlikely beyond that. By the 16nm node SRAMs will need FinFETs or a trigate-like design, which can be fabricated in bulk wafers rather than SOI wafers, as first reported by Toshiba in 2006 and now many others.