Defect Inspection System
The Surfscan AIT (Advanced Inspection Technology) from Tencor Instruments is a new system for in-line defect inspection of advanced logic and memory devices. According to the company, this system is the first in the industry to provide high-speed capture of both patterns and particles for in-line processing. The Surfscan AIT system performs 30 full-wafer inspections per hour at maximum sensitivity, regardless of device type. With advanced signal processing, the system captures process-induced pattern defects, with high defect-to-yield correlation.
Tencor Instruments, Mountain View, CA (415) 969-6767