(December 5, 2003) Schärding, Austria—EV Group (EVG), a MEMS, nano and semiconductor wafer processing equipment manufacturer, has entered into a cooperation agreement with AMO GmbH (AMO), on advanced ultraviolet-nanoimprint lithography (UV-NIL). UV-NIL is a low-cost, high-resolution, large-area patterning process and is competitive with next-generation lithography methods. This cooperation will also be the basis of a consortium on UV-NIL, with the goal of providing total high-volume NIL solutions and infrastructure including equipment, process and suppliers for chemicals, templates and major semiconductor companies.
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